Inventor · disambiguated record
Shinjiroo Ueda
Also filed as: UEDA SHINJIROO
10 granted patents·395 citations·filing 1985–1993
91Inventor score
Files withHITACHI LTD10
Top patents by PatentIndex Score
10 records- 0193US5177448ASynchrotron radiation source with beam stabilizersHITACHI LTD·Filed 1990·Granted Jan 5, 1993·142 cites·14 claims
- 0288US5442183ACharged particle beam apparatus including means for maintaining a vacuum sealHITACHI LTD·Filed 1993·Granted Aug 15, 1995·47 cites·9 claims
- 0385US5254856ACharged particle beam apparatus having particular electrostatic objective lens and vacuum pump systemsHITACHI LTD·Filed 1991·Granted Oct 19, 1993·43 cites·57 claims
- 0485US5062771AVacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamberHITACHI LTD·Filed 1989·Granted Nov 5, 1991·48 cites·52 claims
- 0585US5020969ATurbo vacuum pumpHITACHI LTD·Filed 1989·Granted Jun 4, 1991·55 cites·30 claims
- 0678US4835114AMethod for LPCVD of semiconductors using oil free vacuum pumpsHITACHI LTD·Filed 1987·Granted May 30, 1989·36 cites·16 claims
- 0743US5122175AMethod of and apparatus for producing superpure nitrogenHITACHI LTD·Filed 1990·Granted Jun 16, 1992·11 cites·28 claims
- 0835US4853640ASynchrotron radiation sourceHITACHI LTD·Filed 1988·Granted Aug 1, 1989·5 cites·16 claims
- 0935US4732530ATurbomolecular pumpHITACHI LTD·Filed 1985·Granted Mar 22, 1988·8 cites·10 claims
- 1028US4994753ASynchrotron radiation sourceHITACHI LTD·Filed 1988·Granted Feb 19, 1991·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →