Inventor · disambiguated record
Lars Wischmeier
Also filed as: WISCHMEIER LARS
4 granted patents·1 pending application·4 citations·filing 2012–2021
58Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0188US9874819B2Mirror arrayZEISS CARL SMT GMBH·Filed 2016·Granted Jan 23, 2018·4 cites·23 claims
- 0260US11720028B2Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithographyZEISS CARL SMT GMBH·Filed 2021·Granted Aug 8, 2023·0 cites·20 claims
- 0345US9448490B2EUV lithography systemZEISS CARL SMT GMBH·Filed 2013·Granted Sep 20, 2016·0 cites·19 claims
- 0436US2012249985A1Measurement of an imaging optical system by superposition of patternsWISCHMEIER LARS·Filed 2012·Application pending·0 cites
- 0535US10409167B2Method for illuminating an object field of a projection exposure systemZEISS CARL SMT GMBH·Filed 2016·Granted Sep 10, 2019·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →