Inventor · disambiguated record
Mark Tan
Also filed as: TAN MARK · TAN MARK K
7 granted patents·1 pending application·55 citations·filing 2002–2024
84Inventor score
Top patents by PatentIndex Score
8 records- 0194US10483142B1Vacuum robot positioning system with reduced sensitivity to chamber pressureLAM RES CORP·Filed 2018·Granted Nov 19, 2019·10 cites·19 claims
- 0290US11374819B2Systems and methods for creating virtual devicesWYZE LABS INC·Filed 2021·Granted Jun 28, 2022·5 cites·20 claims
- 0389US8985935B2Mass damper for semiconductor wafer handling end effectorNOVELLUS SYSTEMS INC·Filed 2013·Granted Mar 24, 2015·11 cites·19 claims
- 0473US2025007782A1Systems and methods for creating virtual devicesWYZE LABS INC·Filed 2024·Application pending·0 cites
- 0572US6761085B1Method and apparatus for damping vibrations in a semiconductor wafer handling armNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 13, 2004·15 cites·11 claims
- 0671US12107733B2Systems and methods for creating virtual devicesWYZE LABS INC·Filed 2023·Granted Oct 1, 2024·0 cites·19 claims
- 0771US6976400B1Method and apparatus for damping vibrations in a semiconductor wafer handling armNOVELLUS SYSTEMS INC·Filed 2004·Granted Dec 20, 2005·14 cites·5 claims
- 0867US11729061B2Systems and methods for creating virtual devicesWYZE LABS INC·Filed 2022·Granted Aug 15, 2023·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →