Inventor · disambiguated record
Tzung-Shiun Liu
Also filed as: LIU TZUNG-SHIUN
5 granted patents·2 citations·filing 2015–2020
66Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD5
Top patents by PatentIndex Score
5 records- 0177US10698313B2Apparatus and method for developing a photoresist coated substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 30, 2020·1 cites·20 claims
- 0268US9829786B2PSM blank for enhancing small size CD resolutionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 28, 2017·1 cites·13 claims
- 0367US10969682B2Apparatus and method for developing a photoresist coated substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 6, 2021·0 cites·20 claims
- 0464US11226551B2Lithographic mask, a pellicle therein and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 18, 2022·0 cites·20 claims
- 0556US10802395B2Lithographic mask, a pellicle therein and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 13, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →