Inventor · disambiguated record
Masateru Sato
Also filed as: SATO MASATERU
17 granted patents·1 pending application·192 citations·filing 1988–2024
93Inventor score
Files withSEN CORP5SUMITOMO HEAVY IND ION TECH CO LTD4SUMITOMO EATON NOVA3SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2EATON CORP1
Top patents by PatentIndex Score
18 records- 0189US4904902AIon implanting systemSUMITOMO EATON NOVA·Filed 1988·Granted Feb 27, 1990·44 cites·10 claims
- 0287US9208983B2Ion generation method and ion sourceSEN CORP·Filed 2013·Granted Dec 8, 2015·8 cites·14 claims
- 0386US9117630B2Insulation structure of high voltage electrodes for ion implantation apparatusSEN CORP·Filed 2014·Granted Aug 25, 2015·7 cites·23 claims
- 0485US9281160B2Insulation structure and insulation methodSEN CORP·Filed 2014·Granted Mar 8, 2016·7 cites·23 claims
- 0585US4914292AIon implanting apparatusSUMITOMO EATON NOVA·Filed 1988·Granted Apr 3, 1990·35 cites·8 claims
- 0681US7947129B2Ion source apparatus and cleaning optimized method thereofSEN CORP AN SHI AND AXCELIS COMPANY·Filed 2004·Granted May 24, 2011·25 cites·9 claims
- 0776US9659749B2Beam extraction slit structure and ion sourceSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted May 23, 2017·2 cites·11 claims
- 0868US6060718AIon source having wide output current operating rangeEATON CORP·Filed 1998·Granted May 9, 2000·36 cites·18 claims
- 0965US9153405B2Ion source device and ion beam generating methodSEN CORP·Filed 2013·Granted Oct 6, 2015·1 cites·11 claims
- 1061US9502759B2Antenna cover and plasma generating device using sameSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2014·Granted Nov 22, 2016·1 cites·12 claims
- 1159US7012263B2Ion source apparatus and electronic energy optimized method thereforSUMITOMO EATON NOVA·Filed 2004·Granted Mar 14, 2006·4 cites·11 claims
- 1256US5657531AMagnetic head arm, method of producing the same and apparatus for producing the sameFUJITSU LTD·Filed 1995·Granted Aug 19, 1997·22 cites·12 claims
- 1355US9318298B2Ion generator and ion generating methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Apr 19, 2016·0 cites·13 claims
- 1454US9153406B2Supporting structure and ion generator using the sameSEN CORP·Filed 2014·Granted Oct 6, 2015·0 cites·8 claims
- 1554US2024266140A1Ion generation device and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 1648US10030304B2Ion implantation apparatus and method of cleaning ion implantation apparatusSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2014·Granted Jul 24, 2018·0 cites·18 claims
- 1748US9659755B2Plasma generator and thermal electron emitterSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2016·Granted May 23, 2017·0 cites·15 claims
- 1847US9425023B2Ion generator and thermal electron emitterSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 23, 2016·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →