Inventor · disambiguated record
Rika Takahashi
Also filed as: TAKAHASHI RIKA
2 granted patents·4 citations·filing 2012–2014
44Inventor score
Technology areasG03F
Files withCANON KK2
Top patents by PatentIndex Score
2 records- 0178US8741510B2Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating deviceCANON KK·Filed 2012·Granted Jun 3, 2014·4 cites·5 claims
- 0250US9116444B2Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating deviceCANON KK·Filed 2014·Granted Aug 25, 2015·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →