Inventor · disambiguated record
Yasuhiro Chouno
Also filed as: CHOUNO YASUHIRO
6 granted patents·2 pending applications·94 citations·filing 1993–2010
82Inventor score
Top patents by PatentIndex Score
8 records- 0181US7086410B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Aug 8, 2006·27 cites·27 claims
- 0273US8978670B2Substrate processing apparatusMINAMIDA JUNYA·Filed 2010·Granted Mar 17, 2015·4 cites·6 claims
- 0366US5503171ASubstrates-washing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Apr 2, 1996·46 cites·18 claims
- 0462US7445689B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2003·Granted Nov 4, 2008·9 cites·7 claims
- 0539US6186171B1Pneumatically driven liquid supply apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Feb 13, 2001·8 cites·13 claims
- 0637US7180035B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Feb 20, 2007·0 cites·16 claims
- 0736US2006102210A1Substrate processing containerCHOUNO YASUHIRO·Filed 2003·Application pending·0 cites
- 0834US2007134822A1Process system, process liquid supply method, and process liquid supply programYAMAMOTO SHU·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →