Inventor · disambiguated record
Hyoung Kyu Son
Also filed as: SON HYOUNG KYU
11 granted patents·7 pending applications·70 citations·filing 2006–2024
87Inventor score
Files withSEMES CO LTD6ADVANCED DISPLAY PROC ENG CO3LEE YOUNG JONG3SON HYOUNG KYU3ADP ENGINEERING CO LTD2
Top patents by PatentIndex Score
18 records- 0193US7988817B2Lift pin driving device and a flat panel display manufacturing apparatus having sameADP ENGINEERING CO LTD·Filed 2007·Granted Aug 2, 2011·39 cites·12 claims
- 0288US8075691B2Vacuum processing apparatusLEE YOUNG JONG·Filed 2009·Granted Dec 13, 2011·11 cites·6 claims
- 0379US7770478B2Apparatus and method for measuring chuck attachment forceADP ENGINEERING CO LTD·Filed 2008·Granted Aug 10, 2010·6 cites·17 claims
- 0478US8187384B2Vacuum processing apparatusLEE YOUNG JONG·Filed 2009·Granted May 29, 2012·4 cites·5 claims
- 0578US8152926B2Vacuum processing apparatusLEE YOUNG JONG·Filed 2009·Granted Apr 10, 2012·4 cites·3 claims
- 0674US8623173B2Substrate processing apparatus having electrode memberSON HYOUNG-KYU·Filed 2008·Granted Jan 7, 2014·6 cites·4 claims
- 0763US2025218743A1Substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0861US12362148B2Apparatus for treating substrate and assembly for distributing gasSEMES CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·20 claims
- 0960US2025210321A1Substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 1059US2024203690A1Substrate treatment apparatus and plasma density control methodSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1158US8349082B2Vacuum processing apparatusADVANCED DISPLAY PROC ENG CO·Filed 2009·Granted Jan 8, 2013·0 cites·4 claims
- 1252US11408071B2Gas supplying unit of substrate treating apparatusSEMES CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·24 claims
- 1352US2023215706A1Lift pin unit and unit for supporting substrate and substrate treating apparatusSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1449US2006191118A1Vacuum processing apparatusLEE YOUNG J·Filed 2006·Application pending·0 cites
- 1548US7690913B2Embossing apparatus and methodADVANCED DISPLAY PROC ENG CO·Filed 2007·Granted Apr 6, 2010·0 cites·18 claims
- 1647US2008108154A1Apparatus and method for measuring chuck attachment forceSON HYOUNG KYU·Filed 2007·Application pending·0 cites
- 1743US2008055813A1Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the sameADVANCED DISPLAY PROC ENG CO·Filed 2007·Application pending·0 cites
- 1841US8834673B2Process chamber having gate slit opening and closing apparatusSON HYOUNG KYU·Filed 2007·Granted Sep 16, 2014·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →