Inventor · disambiguated record

Mark E. Michaelian

Also filed as: MICHAELIAN MARK E

4 granted patents·91 citations·filing 2002–2003

78Inventor score

Technology areasH05G

Files withUNIV CENTRAL FLORIDA RES FOUND4

Top patents by PatentIndex Score

4 records

0186US6973164B2Laser-produced plasma EUV light source with pre-pulse enhancementUNIV CENTRAL FLORIDA RES FOUND·Filed 2003·Granted Dec 6, 2005·53 cites·24 claims
0270US6835944B2Low vapor pressure, low debris solid target for EUV productionUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Dec 28, 2004·15 cites·25 claims
0367US6933515B2Laser-produced plasma EUV light source with isolated plasmaUNIV CENTRAL FLORIDA RES FOUND·Filed 2003·Granted Aug 23, 2005·14 cites·11 claims
0463US6912267B2Erosion reduction for EUV laser produced plasma target sourcesUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Jun 28, 2005·9 cites·22 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →