Inventor · disambiguated record
Jung-Nan Tseng
Also filed as: TSENG JUNG-NAN
6 granted patents·42 citations·filing 2000–2002
80Inventor score
Files withUNITED MICROELECTRONICS CORP6
Top patents by PatentIndex Score
6 records- 0172US6341995B1Chemical mechanical polishing apparatusUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jan 29, 2002·15 cites·13 claims
- 0263US6682399B1Pressure monitoring system for chemical-mechanical polishingUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jan 27, 2004·10 cites·16 claims
- 0361US6416615B1Device for detecting abnormality in chemical-mechanical polishing operationUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jul 9, 2002·8 cites·9 claims
- 0458US6648729B2Wafer pressure regulation system for polishing machineUNITED MICROELECTRONICS CORP·Filed 2002·Granted Nov 18, 2003·8 cites·9 claims
- 0545US6676801B2Pressure suppression device for chemical mechanical polishing machine and method thereofUNITED MICROELECTRONICS CORP·Filed 2001·Granted Jan 13, 2004·1 cites·16 claims
- 0635US6267654B1Pad backer for polishing head of chemical mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jul 31, 2001·0 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Jung-Nan Tseng files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →