Inventor · disambiguated record
Michael Grapperhaus
Also filed as: GRAPPERHAUS MICHAEL · GRAPPERHAUS MICHAEL JAMES
6 granted patents·5 pending applications·414 citations·filing 1999–2010
87Inventor score
Top patents by PatentIndex Score
11 records- 0195US6755945B2Ionized PVD with sequential deposition and etchingTOKYO ELECTRON LTD·Filed 2002·Granted Jun 29, 2004·108 cites·43 claims
- 0295US6417626B1Immersed inductively—coupled plasma sourceTOKYO ELECTRON LTD·Filed 2001·Granted Jul 9, 2002·64 cites·46 claims
- 0395US6287435B1Method and apparatus for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 1999·Granted Sep 11, 2001·156 cites·12 claims
- 0494US6719886B2Method and apparatus for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 2001·Granted Apr 13, 2004·54 cites·28 claims
- 0588US6652711B2Inductively-coupled plasma processing systemTOKYO ELECTRON LTD·Filed 2001·Granted Nov 25, 2003·31 cites·29 claims
- 0647US7593289B2Reflectors and reflector light and sound source systemsPHOENIX SCIENCE & TECHNOLOGY I·Filed 2006·Granted Sep 22, 2009·1 cites·34 claims
- 0744US2005089077A1Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomographyTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0843US2007205724A1Advanced surface discharge lamp systemsSCHAEFER RAYMOND B·Filed 2006·Application pending·0 cites
- 0941US2006259198A1Intelligent system for detection of process status, process fault and preventive maintenanceTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1041US2003016727A1Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomographyTOKYO ELECTRON LTD·Filed 2002·Application pending·0 cites
- 1135US2013033968A1Sparker Array SourceSCHAEFER RAYMOND B·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →