Inventor · disambiguated record
Derrek Andrew Russell
Also filed as: RUSSELL DERREK A · RUSSELL DERREK ANDREW
8 granted patents·278 citations·filing 1999–2006
87Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0195US6287435B1Method and apparatus for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 1999·Granted Sep 11, 2001·156 cites·12 claims
- 0294US6719886B2Method and apparatus for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 2001·Granted Apr 13, 2004·54 cites·28 claims
- 0386US6458252B1High target utilization magnetic arrangement for a truncated conical sputtering targetTOKYO ELECTRON LTD·Filed 2000·Granted Oct 1, 2002·24 cites·20 claims
- 0485US7059268B2Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasmaTOKYO ELECTRON LTD·Filed 2002·Granted Jun 13, 2006·37 cites·22 claims
- 0561US6277250B1Dual cathode arrangement for physical vapor deposition of materials onto a round substrate with high aspect ratio featuresTOKYO ELECTRON LTD·Filed 2000·Granted Aug 21, 2001·5 cites·42 claims
- 0659US7315128B2Magnetically enhanced capacitive plasma source for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 2006·Granted Jan 1, 2008·0 cites·23 claims
- 0756US7084573B2Magnetically enhanced capacitive plasma source for ionized physical vapor depositionTOKYO ELECTRON LTD·Filed 2004·Granted Aug 1, 2006·2 cites·19 claims
- 0847US7757633B2Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasmaTOKYO ELECTRON LTD·Filed 2005·Granted Jul 20, 2010·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →