Inventor · disambiguated record
Sang Man Bae
Also filed as: BAE SANG M · BAE SANG-MAN
52 granted patents·4 pending applications·751 citations·filing 1994–2011
98Inventor score
Files withHYUNDAI ELECTRONICS IND40HYNIX SEMICONDUCTOR INC13BAE SANG-MAN2HYUNDAI ELECTROMICS IND CO LTD1
Top patents by PatentIndex Score
56 records- 0189US5498500AOverlay measurement mark and method of measuring an overlay error between multi patterns in a semiconductor device using the measurement markHYUNDAI ELECTRONICS IND·Filed 1994·Granted Mar 12, 1996·59 cites·8 claims
- 0281US6015650AMethod for forming micro patterns of semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1996·Granted Jan 18, 2000·63 cites·6 claims
- 0380US5766809AMethod for testing overlay in a semiconductor device utilizing inclined measuring markHYUNDAI ELECTROMICS IND CO LTD·Filed 1996·Granted Jun 16, 1998·66 cites·14 claims
- 0475US6569605B1Photomask and method for forming micro patterns of semiconductor device using the sameHYUNDAI ELECTRONICS IND·Filed 2000·Granted May 27, 2003·16 cites·9 claims
- 0575US5830624AMethod for forming resist patterns comprising two photoresist layers and an intermediate layerHYUNDAI ELECTRONICS IND·Filed 1995·Granted Nov 3, 1998·42 cites·4 claims
- 0674US5716758AProcess for forming fine pattern for semiconductor device utilizing multiple interlaced exposure masksHYUNDAI ELECTRONICS IND·Filed 1997·Granted Feb 10, 1998·36 cites·8 claims
- 0771US5741625AProcess for forming fine patterns in a semiconductor device utilizing multiple photosensitive film patterns and organic metal-coupled materialHYUNDAI ELECTRONICS IND·Filed 1996·Granted Apr 21, 1998·32 cites·4 claims
- 0869US5532114AMethod of forming a photoresist pattern in a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1995·Granted Jul 2, 1996·31 cites·4 claims
- 0968US7276410B2Semiconductor device with omega gate and method for fabricating a semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2005·Granted Oct 2, 2007·3 cites·7 claims
- 1068US5902493AMethod for forming micro patterns of semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1996·Granted May 11, 1999·20 cites·9 claims
- 1165US7368226B2Method for forming fine patterns of semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2004·Granted May 6, 2008·9 cites·14 claims
- 1265US6836322B2Particle inspection device and inspection method using the sameHYNIX SEMICONDUCTOR INC·Filed 2002·Granted Dec 28, 2004·9 cites·10 claims
- 1362US5698347AReticle for off-axis illuminationHYUNDAI ELECTRONICS IND·Filed 1996·Granted Dec 16, 1997·20 cites·14 claims
- 1461US8507184B2Method of manufacturing semiconductor deviceBAE SANG MAN·Filed 2008·Granted Aug 13, 2013·2 cites·12 claims
- 1561US5563009APhotomask for forming a micropattern of a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1995·Granted Oct 8, 1996·20 cites·4 claims
- 1661US5468577APhotomask having patterns to reduce power of a stepperHYUNDAI ELECTRONICS IND·Filed 1994·Granted Nov 21, 1995·15 cites·4 claims
- 1760US5925578AMethod for forming fine patterns of a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1996·Granted Jul 20, 1999·25 cites·15 claims
- 1860US5635336AMethod for the preparation of a pattern overlay accuracy-measuring markHYUNDAI ELECTRONICS IND·Filed 1996·Granted Jun 3, 1997·22 cites·6 claims
- 1959US8022409B2Semiconductor device with omega gate and method for fabricating a semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2007·Granted Sep 20, 2011·1 cites·9 claims
- 2057US5598250APrefabricated modified illumination apparatus for forming fine patterns in a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1995·Granted Jan 28, 1997·17 cites·6 claims
- 2156US5776640APhoto mask for a process margin test and a method for performing a process margin test using the sameHYUNDAI ELECTRONICS IND·Filed 1997·Granted Jul 7, 1998·21 cites·13 claims
- 2256US5633173AMethod for detecting wafer defectsHYUNDAI ELECTRONICS IND·Filed 1995·Granted May 27, 1997·21 cites·5 claims
- 2356US5571641ADiffraction mask for the fabrication of semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1994·Granted Nov 5, 1996·11 cites·11 claims
- 2455US5811223AMethod for inspecting process defects occurring in semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1996·Granted Sep 22, 1998·20 cites·7 claims
- 2553US6821690B2Photomask and method for forming micro patterns of semiconductor device using the sameHYUNDAI ELECTRONICS IND·Filed 2003·Granted Nov 23, 2004·3 cites·8 claims
- 2652US5721074AMethod for fabricating a light exposure mask comprising the use of a process defect inspection systemHYUNDAI ELECTRONICS IND·Filed 1996·Granted Feb 24, 1998·17 cites·10 claims
- 2752US5668042AMethod for aligning micro patterns of a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1996·Granted Sep 16, 1997·18 cites·12 claims
- 2850US2006234169A1Photo maskHYNIX SEMICONDUCTOR INC·Filed 2005·Application pending·0 cites
- 2949US7736843B2Method for manufacturing a semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2007·Granted Jun 15, 2010·0 cites·8 claims
- 3049US6864590B2Alignment mark for aligning wafer of semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2003·Granted Mar 8, 2005·3 cites·7 claims
- 3149US5989788AMethod for forming resist patterns having two photoresist layers and an intermediate layerHYUNDAI ELECTRONICS IND·Filed 1997·Granted Nov 23, 1999·13 cites·2 claims
- 3248US5508133APhoto maskHYUNDAI ELECTRONICS IND·Filed 1994·Granted Apr 16, 1996·8 cites·15 claims
- 3346US2009170329A1Photo maskHYNIX SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 3444US7755149B2Photo mask and semiconductor device fabricated using the sameHYNIX SEMICONDUCTOR INC·Filed 2005·Granted Jul 13, 2010·0 cites·3 claims
- 3543US2007042276A1Lithography apparatus and method for using the sameHYNIX SEMICONDUCTOR INC·Filed 2006·Application pending·0 cites
- 3642US5870201AMagnification measuring markHYUNDAI ELECTRONICS IND·Filed 1997·Granted Feb 9, 1999·9 cites·6 claims
- 3741US5882980AProcess of forming bipolar alignment mark for semiconductorHYUNDAI ELECTRONICS IND·Filed 1997·Granted Mar 16, 1999·9 cites·4 claims
- 3841US5705319AProcess for forming fine patterns for a semiconductor device utilizing three photosensitive layersHYUNDAI ELECTRONICS IND·Filed 1996·Granted Jan 6, 1998·7 cites·2 claims
- 3941US5675418APattern alignment mark of semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1995·Granted Oct 7, 1997·7 cites·12 claims
- 4040US7709186B2Method for exposing photoresist film of semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2004·Granted May 4, 2010·0 cites·15 claims
- 4140US5821131AMethod for inspecting process defects occurring in semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1996·Granted Oct 13, 1998·8 cites·12 claims
- 4240US5817445AMethod for inspecting process defects occurring in semiconductor devicesHYUNDAI ELECTRONICS IND·Filed 1996·Granted Oct 6, 1998·8 cites·7 claims
- 4340US5578423AMethod for the preparation of a pattern overlay accuracy-measuring markHYUNDAI ELECTRONICS IND·Filed 1994·Granted Nov 26, 1996·8 cites·7 claims
- 4440US5536534AMethod and apparatus for coating photoresistHYUNDAI ELECTRONICS IND·Filed 1995·Granted Jul 16, 1996·8 cites·5 claims
- 4539US5498449APhotoresist film coating methodHYUNDAI ELECTRONICS IND·Filed 1995·Granted Mar 12, 1996·5 cites·3 claims
- 4638US6329106B1Repair method for phase shift mask in semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1999·Granted Dec 11, 2001·9 cites·9 claims
- 4737US5705300APhase shift mask and method for fabricating the sameHYUNDAI ELECTRONICS IND·Filed 1995·Granted Jan 6, 1998·4 cites·5 claims
- 4836US8053312B2Semiconductor device and method for fabricating the sameHYNIX SEMICONDUCTOR INC·Filed 2005·Granted Nov 8, 2011·0 cites·12 claims
- 4936US7875515B2Method for manufacturing capacitor of semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2008·Granted Jan 25, 2011·0 cites·16 claims
- 5036US5849438APhase shift mask and method for fabricating the sameHYUNDAI ELECTRONICS IND·Filed 1996·Granted Dec 15, 1998·4 cites·20 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →