Inventor · disambiguated record
William S. Kennedy
Also filed as: KENNEDY WILLIAM · KENNEDY WILLIAM S
37 granted patents·6 pending applications·3,444 citations·filing 1975–2019
99Inventor score
Files withLAM RES CORP22ALCATEL LUCENT USA INC3WESTERN ATLAS INT INC3ACUREX CORP2AMERICAN TENNIS SYSTEMS INC2
Top patents by PatentIndex Score
43 records- 0199US7858898B2Bevel etcher with gap controlLAM RES CORP·Filed 2007·Granted Dec 28, 2010·349 cites·19 claims
- 0299US7645341B2Showerhead electrode assembly for plasma processing apparatusesLAM RES CORP·Filed 2003·Granted Jan 12, 2010·576 cites·12 claims
- 0399US6129808ALow contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 1998·Granted Oct 10, 2000·215 cites·38 claims
- 0499US4135493AParabolic trough solar energy collector assemblyACUREX CORP·Filed 1977·Granted Jan 23, 1979·208 cites·10 claims
- 0598US6394026B1Low contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 2000·Granted May 28, 2002·107 cites·30 claims
- 0698US6073577AElectrode for plasma processes and method for manufacture and use thereofLAM RES CORP·Filed 1998·Granted Jun 13, 2000·242 cites·9 claims
- 0798US6063234ATemperature sensing system for use in a radio frequency environmentLAM RES CORP·Filed 1997·Granted May 16, 2000·289 cites·33 claims
- 0897US6376385B2Method of manufacturing assembly for plasma reaction chamber and use thereofLAM RES CORP·Filed 2001·Granted Apr 23, 2002·99 cites·14 claims
- 0997US6194322B1Electrode for plasma processes and method for a manufacture and use thereofLAM RES CORP·Filed 2000·Granted Feb 27, 2001·89 cites·14 claims
- 1097US5863376ATemperature controlling method and apparatus for a plasma processing chamberLAM RES CORP·Filed 1996·Granted Jan 26, 1999·281 cites·23 claims
- 1194US7943007B2Configurable bevel etcherLAM RES CORP·Filed 2007·Granted May 17, 2011·24 cites·11 claims
- 1294US6148765AElectrode for plasma processes and method for manufacture and use thereofLAM RES CORP·Filed 1999·Granted Nov 21, 2000·72 cites·18 claims
- 1393US8580078B2Bevel etcher with vacuum chuckBAILEY III ANDREW D·Filed 2007·Granted Nov 12, 2013·20 cites·11 claims
- 1493US7543547B1Electrode assembly for plasma processing apparatusLAM RES CORP·Filed 2003·Granted Jun 9, 2009·39 cites·29 claims
- 1593US6583064B2Low contamination high density plasma etch chambers and methods for making the sameLAM RES CORP·Filed 2002·Granted Jun 24, 2003·89 cites·13 claims
- 1692US8080107B2Showerhead electrode assembly for plasma processing apparatusesKENNEDY WILLIAM S·Filed 2009·Granted Dec 20, 2011·27 cites·13 claims
- 1792US6408786B1Semiconductor processing equipment having tiled ceramic linerLAM RES CORP·Filed 1999·Granted Jun 25, 2002·97 cites·20 claims
- 1891US8721908B2Bevel etcher with vacuum chuckLAM RES CORP·Filed 2013·Granted May 13, 2014·9 cites·13 claims
- 1991US7827657B2Method of making an electrode assembly for plasma processing apparatusLAM RES CORP·Filed 2009·Granted Nov 9, 2010·11 cites·8 claims
- 2091US6227140B1Semiconductor processing equipment having radiant heated ceramic linerLAM RES CORP·Filed 1999·Granted May 8, 2001·119 cites·20 claims
- 2189US4671379AMethod and apparatus for generating seismic wavesPETROPHYSICAL SERVICES INC·Filed 1985·Granted Jun 9, 1987·73 cites·23 claims
- 2287US4177083APhotovoltaic concentratorACUREX CORP·Filed 1977·Granted Dec 4, 1979·60 cites·1 claims
- 2385US9234775B2Methods for verifying gas flow rates from a gas supply system into a plasma processing chamberLAM RES CORP·Filed 2013·Granted Jan 12, 2016·6 cites·25 claims
- 2485US9053925B2Configurable bevel etcherBAILEY III ANDREW D·Filed 2011·Granted Jun 9, 2015·6 cites·13 claims
- 2582US7861667B2Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrodeLAM RES CORP·Filed 2003·Granted Jan 4, 2011·23 cites·31 claims
- 2678US4046131ATennis ball collection, pick-up and propelling systemAMERICAN TENNIS SYSTEMS INC·Filed 1975·Granted Sep 6, 1977·44 cites·9 claims
- 2777US4509587APassive temperature control shipment containerCLARK THOMAS S·Filed 1982·Granted Apr 9, 1985·44 cites·2 claims
- 2873US4715469ABorehole seismic receiverPETROPHYSICAL SERVICES INC·Filed 1985·Granted Dec 29, 1987·36 cites·2 claims
- 2972US4834210AApparatus for generating seismic wavesWESTERN ATLAS INT INC·Filed 1987·Granted May 30, 1989·29 cites·12 claims
- 3071US4108432ATennis ball collection, pick-up and propelling systemAMERICAN TENNIS SYSTEMS INC·Filed 1975·Granted Aug 22, 1978·34 cites·3 claims
- 3166US8573153B2Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrodeFISCHER ANDREAS·Filed 2010·Granted Nov 5, 2013·1 cites·14 claims
- 3266US5438169AApparatus and method for determining the quality of clamping of a borehole seismic sensor system to the wall of a wellboreWESTERN ATLAS INT INC·Filed 1994·Granted Aug 1, 1995·30 cites·18 claims
- 3366US4941349ACoaxial coiled-tubing cable headWESTERN ATLAS INT INC·Filed 1989·Granted Jul 17, 1990·37 cites·6 claims
- 3463US6306244B1Apparatus for reducing polymer deposition on substrate supportLAM RES CORP·Filed 1999·Granted Oct 23, 2001·28 cites·29 claims
- 3560US6035868AMethod and apparatus for control of deposit build-up on an inner surface of a plasma processing chamberLAM RES CORP·Filed 1997·Granted Mar 14, 2000·21 cites·15 claims
- 3648US2016092595A1Systems And Methods For Processing GraphsALCATEL LUCENT USA INC·Filed 2014·Application pending·0 cites
- 3746US6155203AApparatus for control of deposit build-up on an inner surface of a plasma processing chamberLAM RES CORP·Filed 1999·Granted Dec 5, 2000·10 cites·8 claims
- 3846US2015100544A1Methods and systems for determining hierarchical community decompositionALCATEL LUCENT USA INC·Filed 2013·Application pending·0 cites
- 3945US2020226188A1Adaptive recommendation system and method for network-based contentNOKIA SOLUTIONS & NETWORKS OY·Filed 2019·Application pending·0 cites
- 4042US9614677B2Secure function evaluation of tree circuitsALCATEL LUCENT USA INC·Filed 2015·Granted Apr 4, 2017·0 cites·22 claims
- 4141US2014143882A1Systems and methods for preserving privacy for web applicationsSANIEE IRAJ·Filed 2012·Application pending·0 cites
- 4237US2015091909A1Systems And Methods For Distance Approximation In GraphsALCATEL LUCENT·Filed 2013·Application pending·0 cites
- 4336US2018081880A1Method And Apparatus For Ranking Electronic Information By Similarity AssociationALCATEL LUCENT CANADA INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →