Inventor · disambiguated record
Hans-Michael Stiepan
Also filed as: STIEPAN HANS-MICHAEL
12 granted patents·6 pending applications·18 citations·filing 2017–2025
83Inventor score
Files withZEISS CARL SMT GMBH18
Top patents by PatentIndex Score
18 records- 0193US11809085B2Mirror, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2021·Granted Nov 7, 2023·2 cites·22 claims
- 0291US10337850B2Interferometric measuring arrangementZEISS CARL SMT GMBH·Filed 2017·Granted Jul 2, 2019·10 cites·13 claims
- 0385US10502545B2Measuring method and measuring arrangement for an imaging optical systemZEISS CARL SMT GMBH·Filed 2017·Granted Dec 10, 2019·4 cites·18 claims
- 0478US10422718B2Test device and method for testing a mirrorZEISS CARL SMT GMBH·Filed 2017·Granted Sep 24, 2019·2 cites·18 claims
- 0570US2025258444A1Optical system, and method for operating an optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0667US2025216801A1Mirror device, projection objective and method for measuring the temperature of a mirrorZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0764US12210289B2Mirror, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Jan 28, 2025·0 cites·22 claims
- 0862US12405108B2Production method and measurement methodZEISS CARL SMT GMBH·Filed 2023·Granted Sep 2, 2025·0 cites·13 claims
- 0962US2025093782A1Method for operating a projection exposure system, and projection exposure systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1060US12411417B2Projection objective including an optical deviceZEISS CARL SMT GMBH·Filed 2023·Granted Sep 9, 2025·0 cites·20 claims
- 1159US12288706B2Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structuresZEISS CARL SMT GMBH·Filed 2022·Granted Apr 29, 2025·0 cites·16 claims
- 1257US12085780B2Optical system, heating arrangement, and method for heating an optical element in an optical systemZEISS CARL SMT GMBH·Filed 2022·Granted Sep 10, 2024·0 cites·20 claims
- 1355US12332043B2Measurement method for interferometrically determining a surface shapeZEISS CARL SMT GMBH·Filed 2021·Granted Jun 17, 2025·0 cites·10 claims
- 1453US12235097B2Diffractive optical element for a test interferometerZEISS CARL SMT GMBH·Filed 2022·Granted Feb 25, 2025·0 cites·20 claims
- 1547US2023176492A1Optical system and method of operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1641US2020011650A1Metrology targetZEISS CARL SMT GMBH·Filed 2019·Application pending·0 cites
- 1739US2018217509A1Method and device for characterizing a wafer patterned by at least one lithography stepZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 1837US10509330B2Method and device for characterizing a wafer patterned using at least one lithography stepZEISS CARL SMT GMBH·Filed 2018·Granted Dec 17, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →