Inventor · disambiguated record
Tadayoshi Yoshikawa
Also filed as: YOSHIKAWA TADAYOSHI
7 granted patents·2 pending applications·84 citations·filing 1979–2020
82Inventor score
Top patents by PatentIndex Score
9 records- 0193US8441772B2Substrate for electrostatic chuck and electrostatic chuckYOSHIKAWA TADAYOSHI·Filed 2010·Granted May 14, 2013·44 cites·10 claims
- 0281US4230762AAsphalt water-proofing materialMITSUI PETROCHEMICAL IND·Filed 1979·Granted Oct 28, 1980·29 cites·10 claims
- 0378US11521885B2Substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2020·Granted Dec 6, 2022·1 cites·16 claims
- 0475US8505928B2Substrate temperature control fixing apparatusSAITO MIKI·Filed 2009·Granted Aug 13, 2013·8 cites·7 claims
- 0568US9120704B2Dielectric layer for electrostatic chuck and electrostatic chuckNIPPON TUNGSTEN·Filed 2013·Granted Sep 1, 2015·2 cites·10 claims
- 0651US8686743B2Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatusFURUMURA YUJI·Filed 2009·Granted Apr 1, 2014·0 cites·14 claims
- 0747US2009168292A1Electrostatic chuck and substrate temperature adjusting-fixing deviceSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
- 0846US2009059461A1Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
- 0941US9837297B2Tray and wafer holding apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Dec 5, 2017·0 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Tadayoshi Yoshikawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →