Inventor · disambiguated record
Azmi Kadkly
Also filed as: KADKLY AZMI
6 granted patents·33 citations·filing 2005–2013
79Inventor score
Top patents by PatentIndex Score
6 records- 0189US7385688B1Multi-spot illumination and collection optics for highly tilted wafer planesKLA TENCOR TECH CORP·Filed 2005·Granted Jun 10, 2008·17 cites·19 claims
- 0280US8879056B2Multi-spot illumination for wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Nov 4, 2014·3 cites·7 claims
- 0380US7746459B2Systems configured to inspect a waferKLA TENCOR TECH CORP·Filed 2007·Granted Jun 29, 2010·7 cites·29 claims
- 0475US8462329B2Multi-spot illumination for wafer inspectionZHAO GUOHENG·Filed 2011·Granted Jun 11, 2013·2 cites·11 claims
- 0574US7345752B1Multi-spot illumination and collection optics for highly tilted wafer planesKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·4 cites·18 claims
- 0634US8223443B2Collection opticsKADKLY AZMI·Filed 2010·Granted Jul 17, 2012·0 cites·19 claims
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