Inventor · disambiguated record
Kenichi Suzaki
Also filed as: SUZAKI KENICHI
30 granted patents·10 pending applications·838 citations·filing 2002–2025
96Inventor score
Files withHITACHI INT ELECTRIC INC17KOKUSAI ELECTRIC CORP16NODA TAKAAKI2SUZAKI KENICHI2HITACHI KOKUSSAI ELECTRIC INC1
Top patents by PatentIndex Score
40 records- 0198US9708708B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 18, 2017·465 cites·14 claims
- 0296US9970112B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted May 15, 2018·279 cites·10 claims
- 0393US9093270B2Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Jul 28, 2015·11 cites·18 claims
- 0492US11293096B2Substrate processing apparatus, method for manufacturing semiconductor device and vaporizerHITACHI INT ELECTRIC INC·Filed 2018·Granted Apr 5, 2022·8 cites·12 claims
- 0586US8999858B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2012·Granted Apr 7, 2015·7 cites·16 claims
- 0682US10876207B2Substrate processing apparatus, liquid precursor replenishment system, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2019·Granted Dec 29, 2020·3 cites·11 claims
- 0782US7556839B2Method of manufacturing semiconductor device and apparatus for processing substrateHITACHI INT ELECTRIC INC·Filed 2005·Granted Jul 7, 2009·6 cites·11 claims
- 0880US12234550B2Vaporizer, processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 0980US7731797B2Substrate treating apparatus and semiconductor device manufacturing methodHITACHI INT ELECTRIC INC·Filed 2005·Granted Jun 8, 2010·7 cites·11 claims
- 1078US2025308945A1Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 1177US11020760B2Substrate processing apparatus and precursor gas nozzleHITACHI INT ELECTRIC INC·Filed 2017·Granted Jun 1, 2021·3 cites·10 claims
- 1276US8231731B2Substrate processing apparatusSUZAKI KENICHI·Filed 2011·Granted Jul 31, 2012·3 cites·18 claims
- 1371US11970771B2Vaporizer, substrate processing apparatus and method for manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2022·Granted Apr 30, 2024·0 cites·22 claims
- 1471US2025293016A1Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 1570US8227030B2Method of manufacturing semiconductor device and apparatus for processing substrateNODA TAKAAKI·Filed 2009·Granted Jul 24, 2012·2 cites·12 claims
- 1670US8221835B2Method of manufacturing semiconductor device and apparatus for processing substrateNODA TAKAAKI·Filed 2009·Granted Jul 17, 2012·2 cites·14 claims
- 1770US6790793B2Method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Sep 14, 2004·13 cites·15 claims
- 1869US12354868B2Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Granted Jul 8, 2025·0 cites·18 claims
- 1969US9390916B2Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Jul 12, 2016·1 cites·18 claims
- 2068US11873555B2Vaporizer, substrate processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jan 16, 2024·0 cites·15 claims
- 2168US8636882B2Producing method of semiconductor device and substrate processing apparatusSUZAKI KENICHI·Filed 2009·Granted Jan 28, 2014·2 cites·17 claims
- 2266US8211798B2Substrate treating apparatus and method for manufacturing semiconductor deviceOZAKI TAKASHI·Filed 2011·Granted Jul 3, 2012·1 cites·15 claims
- 2366US7737034B2Substrate treating apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Jun 15, 2010·7 cites·12 claims
- 2464US12354887B2Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 8, 2025·0 cites·15 claims
- 2563US6720274B2Method for fabricating a semiconductor device and a substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2002·Granted Apr 13, 2004·8 cites·13 claims
- 2659US2009205567A1Method of manufacturing semiconductor device and apparatus for processing substrateHITACHI INT ELECTRIC INC·Filed 2009·Application pending·0 cites
- 2758US2023332287A1Substrate processing apparatus, liquid source replenishment system, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 2856USD828091SGas supply nozzleHITACHI INT ELECTRIC INC·Filed 2016·Granted Sep 11, 2018·8 cites·1 claims
- 2955US12488999B2Substrate processing apparatus, cleaning method, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2022·Granted Dec 2, 2025·0 cites·18 claims
- 3054US2022403511A1Substrate processing apparatus, exhaust device and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 3154US2023098746A1Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 3252US7915165B2Substrate treating apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2010·Granted Mar 29, 2011·0 cites·15 claims
- 3351US12249502B2Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Mar 11, 2025·0 cites·19 claims
- 3451US2023304149A1Substrate processing apparatus, method of manufacturing semiconductor device and substrate supportKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 3550US11929272B2Substrate processing apparatus, substrate support, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Granted Mar 12, 2024·0 cites·7 claims
- 3647US11866822B2Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Granted Jan 9, 2024·0 cites·14 claims
- 3746US7955991B2Producing method of a semiconductor device using CVD processingHITACHI KOKUSSAI ELECTRIC INC·Filed 2004·Granted Jun 7, 2011·2 cites·17 claims
- 3846US2008268644A1Manufacturing method of semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 3937US2011217852A1Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2011·Application pending·0 cites
- 4032US2012052203A1Substrate processing apparatus and method of processing substrateMIYASHITA TOMOYASU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →