Inventor · disambiguated record
Hsin-Ching Shih
Also filed as: SHIH HSIN-CHING
3 granted patents·1 pending application·58 citations·filing 2001–2004
71Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0181US6797627B1Dry-wet-dry solvent-free process after stop layer etch in dual damascene processTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Sep 28, 2004·35 cites·14 claims
- 0275US7122484B2Process for removing organic materials during formation of a metal interconnectTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 17, 2006·19 cites·31 claims
- 0348US6974505B2Tool for cleaning substratesTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Dec 13, 2005·4 cites·14 claims
- 0437US2005184388A1Seal ring design without stop layer punch through during via etchTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →