Inventor · disambiguated record
Tadahiro Takigawa
Also filed as: TAKIGAWA TADAHIRO
15 granted patents·641 citations·filing 1976–1997
95Inventor score
Top patents by PatentIndex Score
15 records- 0196US5429730AMethod of repairing defect of structureTOSHIBA KK·Filed 1993·Granted Jul 4, 1995·114 cites·54 claims
- 0294US4712013AMethod of forming a fine pattern with a charged particle beamTOSHIBA KK·Filed 1987·Granted Dec 8, 1987·74 cites·17 claims
- 0393US4457803AProcessing method using a focused ion beamTOKYO SHIBAURA ELECTRIC CO·Filed 1982·Granted Jul 3, 1984·106 cites·4 claims
- 0490US4199689AElectron beam exposing method and electron beam apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1978·Granted Apr 22, 1980·29 cites·12 claims
- 0588US5639699AFocused ion beam deposition using TMCTSTOSHIBA KK·Filed 1995·Granted Jun 17, 1997·62 cites·11 claims
- 0686US4430570AElectron beam exposing apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1980·Granted Feb 7, 1984·27 cites·6 claims
- 0783US4321510AElectron beam systemTOKYO SHIBAURA ELECTRIC CO·Filed 1980·Granted Mar 23, 1982·25 cites·7 claims
- 0882US5083033AMethod of depositing an insulating film and a focusing ion beam apparatusTOSHIBA KK·Filed 1990·Granted Jan 21, 1992·80 cites·22 claims
- 0980US5909030APattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatusTOSHIBA KK·Filed 1997·Granted Jun 1, 1999·45 cites·11 claims
- 1069US4363995AElectron gunTOKYO SHIBAURA ELECTRIC CO·Filed 1980·Granted Dec 14, 1982·13 cites·6 claims
- 1168US4424448AElectron beam apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1980·Granted Jan 3, 1984·12 cites·14 claims
- 1267US4080618AInsulated-gate field-effect transistorTOKYO SHIBAURA ELECTRIC CO·Filed 1976·Granted Mar 21, 1978·24 cites·1 claims
- 1364US4151417AElectron beam exposure apparatusVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Apr 24, 1979·9 cites·7 claims
- 1450US4481042AIon implantation methodTOKYO SHIBAURA ELECTRIC CO·Filed 1982·Granted Nov 6, 1984·15 cites·4 claims
- 1534US4530064AExposure method utilizing an energy beamTOKYO SHIBAURA ELECTRIC CO·Filed 1982·Granted Jul 16, 1985·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →