Inventor · disambiguated record
Irina Lyulina
Also filed as: LYULINA IRINA · LYULINA IRINA ANATOLIEVNA
12 granted patents·2 pending applications·89 citations·filing 2012–2025
91Inventor score
Files withASML NETHERLANDS BV11ASML NETHERLANDS N V1LYULINA IRINA1VAN DER SANDEN STEFAN CORNELIS THEODORUS1
Top patents by PatentIndex Score
14 records- 0197US11940740B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2022·Granted Mar 26, 2024·2 cites·20 claims
- 0297US10642162B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·8 cites·23 claims
- 0397US9946165B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2014·Granted Apr 17, 2018·19 cites·20 claims
- 0496US10274834B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2018·Granted Apr 30, 2019·15 cites·20 claims
- 0593US10474045B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 12, 2019·6 cites·20 claims
- 0692US9291916B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsASML NETHERLANDS BV·Filed 2015·Granted Mar 22, 2016·5 cites·12 claims
- 0792US8976355B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsVAN DER SANDEN STEFAN CORNELIS THEODORUS·Filed 2012·Granted Mar 10, 2015·19 cites·8 claims
- 0887US12287584B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
- 0986US9454084B2Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement systemASML NETHERLANDS BV·Filed 2013·Granted Sep 27, 2016·5 cites·15 claims
- 1085US2025264813A1Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1179US8982347B2Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatusASML NETHERLANDS N V·Filed 2012·Granted Mar 17, 2015·8 cites·17 claims
- 1274US11385550B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 1374US9753377B2Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 1437US2012218533A1Method of calculating model parameters of a substrate, a lithographic apparatus and an apparatus for controlling lithographic processing by a lithographic apparatusLYULINA IRINA·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →