Inventor · disambiguated record
Sayaka Tanimoto
Also filed as: TANIMOTO SAYAKA
15 granted patents·2 pending applications·207 citations·filing 2003–2016
93Inventor score
Top patents by PatentIndex Score
17 records- 0197US7880143B2Electron beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 1, 2011·54 cites·17 claims
- 0294US7378668B2Method and apparatus for applying charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted May 27, 2008·25 cites·11 claims
- 0393US7060984B2Multi-charged beam lens and charged beam exposure apparatus using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 13, 2006·42 cites·16 claims
- 0491US7906761B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Mar 15, 2011·16 cites·25 claims
- 0591US7408760B2Charged particle beam application systemHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·21 cites·12 claims
- 0688US10037866B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Jul 31, 2018·5 cites·14 claims
- 0788US7655907B2Charged particle beam apparatus and pattern measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 2, 2010·12 cites·12 claims
- 0881US8193493B2Charged particle beam apparatusTANIMOTO SAYAKA·Filed 2011·Granted Jun 5, 2012·6 cites·10 claims
- 0974US7105842B2Method of charged particle beam lithography and equipment for charged particle beam lithographyCANON KK·Filed 2004·Granted Sep 12, 2006·10 cites·14 claims
- 1072US7679056B2Metrology system of fine pattern for process control by charged particle beamHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 16, 2010·4 cites·4 claims
- 1166US7276709B2System and method for electron-beam lithographyHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 2, 2007·2 cites·8 claims
- 1256US7098464B2Electron beam writing equipment and electron beam writing methodCANON KK·Filed 2004·Granted Aug 29, 2006·5 cites·30 claims
- 1356US6870310B2Multibeam generating apparatus and electron beam drawing apparatusCANON KK·Filed 2003·Granted Mar 22, 2005·5 cites·15 claims
- 1451US8026482B2Charged particle beam apparatus and control method thereforHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 27, 2011·0 cites·17 claims
- 1547US9287082B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 15, 2016·0 cites·12 claims
- 1645US2008067376A1Charged particle beam apparatusTANIMOTO SAYAKA·Filed 2007·Application pending·0 cites
- 1744US2013248731A1Electron beam apparatus and lens arrayHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →