Inventor · disambiguated record
Rogier Herman Mathijs Groeneveld
Also filed as: GROENEVELD ROGIER H M · GROENEVELD ROGIER HERMAN MATHIJS
2 granted patents·2 pending applications·13 citations·filing 2001–2009
56Inventor score
Top patents by PatentIndex Score
4 records- 0165US8908144B2Lithographic apparatus and device manufacturing methodGROENEVELD ROGIER HERMAN MATHIJS·Filed 2006·Granted Dec 9, 2014·3 cites·11 claims
- 0257US6730920B2Abbe arm calibration system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2001·Granted May 4, 2004·10 cites·20 claims
- 0345US2011122389A1Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0441US2004184018A1Abbe arm calibration system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →