Inventor · disambiguated record
Ikunao Isomura
Also filed as: ISOMURA IKUNAO
30 granted patents·1 pending application·236 citations·filing 1997–2020
96Inventor score
Files withNUFLARE TECHNOLOGY INC12TOSHIBA KK9ADVANCED MASK INSPECTION TECH3TOPCON CORP3AKIYAMA HIROTERU1
Top patents by PatentIndex Score
31 records- 0191US9535015B2Pattern inspection method and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jan 3, 2017·15 cites·13 claims
- 0290US8254663B2Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removabilityKATAOKA AKIRA·Filed 2009·Granted Aug 28, 2012·14 cites·5 claims
- 0387US7379176B2Mask defect inspection apparatusTOPCON CORP·Filed 2005·Granted May 27, 2008·8 cites·17 claims
- 0486US10026011B2Mask inspection apparatus, mask evaluation method and mask evaluation systemNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jul 17, 2018·6 cites·13 claims
- 0586US9728373B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Aug 8, 2017·4 cites·10 claims
- 0685US7590277B2Pattern inspecting methodTOSHIBA KK·Filed 2005·Granted Sep 15, 2009·15 cites·11 claims
- 0783US8442320B2Pattern inspection apparatus and pattern inspection methodISOMURA IKUNAO·Filed 2010·Granted May 14, 2013·6 cites·10 claims
- 0883US7630535B2Die-to-die photomask defect detection using region data to modify inspection thresholdsADVANCED MASK INSPECTION TECH·Filed 2006·Granted Dec 8, 2009·13 cites·7 claims
- 0980US6285783B1Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor waferTOSHIBA KK·Filed 1997·Granted Sep 4, 2001·74 cites·40 claims
- 1077US7664308B2Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limitsADVANCED MASK INSPECTION TECH·Filed 2005·Granted Feb 16, 2010·9 cites·13 claims
- 1175US8861832B2Inspection system and methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 14, 2014·4 cites·5 claims
- 1275US7526119B2Pattern inspection apparatusTOSHIBA KK·Filed 2003·Granted Apr 28, 2009·21 cites·22 claims
- 1374US7551767B2Pattern inspection apparatusTOSHIBA KK·Filed 2008·Granted Jun 23, 2009·5 cites·9 claims
- 1473US7639863B2Die-to-database photomask defect detection using region data to modify inspection thresholdsADVANCED MASK INSPECTION TECH·Filed 2005·Granted Dec 29, 2009·10 cites·10 claims
- 1572US7421109B2Pattern inspection apparatusTOSHIBA KK·Filed 2003·Granted Sep 2, 2008·13 cites·9 claims
- 1671US7551273B2Mask defect inspection apparatusTOPCON CORP·Filed 2008·Granted Jun 23, 2009·2 cites·17 claims
- 1771US7522276B2Pattern inspection methodTOSHIBA KK·Filed 2008·Granted Apr 21, 2009·2 cites·22 claims
- 1867US7415149B2Pattern inspection apparatusTOSHIBA KK·Filed 2007·Granted Aug 19, 2008·3 cites·7 claims
- 1966US10290094B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted May 14, 2019·1 cites·10 claims
- 2065US7359546B2Defect inspection apparatus and defect inspection methodTOSHIBA KK·Filed 2005·Granted Apr 15, 2008·4 cites·20 claims
- 2163US9235883B2Inspection system and methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jan 12, 2016·1 cites·5 claims
- 2263US7372560B2Pattern inspection apparatusTOSHIBA KK·Filed 2004·Granted May 13, 2008·3 cites·22 claims
- 2362US9767547B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Sep 19, 2017·2 cites·10 claims
- 2456US9230317B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jan 5, 2016·1 cites·8 claims
- 2550US11443419B2Reference image generation method and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Sep 13, 2022·0 cites·7 claims
- 2646US9811896B2Measuring apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Nov 7, 2017·0 cites·15 claims
- 2746US9659361B2Measuring apparatus that generates positional deviation distribution of a pattern on a target objectNUFLARE TECHNOLOGY INC·Filed 2014·Granted May 23, 2017·0 cites·9 claims
- 2844US7760349B2Mask-defect inspecting apparatus with movable focusing lensTOPCON CORP·Filed 2005·Granted Jul 20, 2010·0 cites·2 claims
- 2939US10578560B2Inspection apparatus and method for detecting false defectsAKIYAMA HIROTERU·Filed 2012·Granted Mar 3, 2020·0 cites·2 claims
- 3038US9626755B2Mask inspection apparatus and mask inspection methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Apr 18, 2017·0 cites·8 claims
- 3136US2012081538A1Pattern inspection apparatusOGAWA RIKI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →