Inventor · disambiguated record
Sachiko Kihara
Also filed as: KIHARA SACHIKO
3 granted patents·2 pending applications·80 citations·filing 2000–2003
73Inventor score
Technology areasH10P
Files withEBARA CORP3
Top patents by PatentIndex Score
5 records- 0191US6558478B1Method of and apparatus for cleaning substrateEBARA CORP·Filed 2000·Granted May 6, 2003·65 cites·30 claims
- 0268US6745784B2Method of and apparatus for cleaning substrateEBARA CORP·Filed 2003·Granted Jun 8, 2004·11 cites·28 claims
- 0352US6776919B2Method and apparatus for etching ruthenium filmsEBARA CORP·Filed 2001·Granted Aug 17, 2004·4 cites·11 claims
- 0434US2003092264A1Substrate processing apparatus and methodFiled 2002·Application pending·0 cites
- 0533US2004216841A1Substrate processing apparatusFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →