Inventor · disambiguated record
Tutomu Hiroki
Also filed as: HIROKI TUTOMU
4 granted patents·270 citations·filing 1993–1995
82Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0192US5636960AApparatus for detecting and aligning a substrateTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·77 cites·5 claims
- 0281US5509771AVacuum processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Apr 23, 1996·94 cites·23 claims
- 0368US5558482AMulti-chamber systemTOKYO ELECTRON LTD·Filed 1994·Granted Sep 24, 1996·51 cites·14 claims
- 0468US5306380AVacuum processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Apr 26, 1994·48 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Tutomu Hiroki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →