Inventor · disambiguated record
Klaus-Dieter Adam
Also filed as: ADAM KLAUS · ADAM KLAUS-DIETER
13 granted patents·1 pending application·117 citations·filing 1977–2008
90Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH7BOSCH GMBH ROBERT2AVANEX CORP1BOESSER HANS-ARTUR1LEICA MICROSYS LITHOGRAPHY LTD1
Top patents by PatentIndex Score
14 records- 0191US4499750ADrawing device for presses with mechanically driven drawing ramSCHULER GMBH L·Filed 1982·Granted Feb 19, 1985·49 cites·4 claims
- 0277US5094208AFuel control systemBOSCH GMBH ROBERT·Filed 1988·Granted Mar 10, 1992·22 cites·16 claims
- 0371US7450246B2Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one directionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Nov 11, 2008·8 cites·20 claims
- 0467US7551296B2Method for determining the focal position of at least two edges of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 23, 2009·5 cites·13 claims
- 0563US4125010AHydraulic pressSMG SUEDDEUTSCHE MASCHINENBAU·Filed 1977·Granted Nov 14, 1978·13 cites·12 claims
- 0658US6736554B2Low-stress internal structure for optoelectronic housingAVANEX CORP·Filed 2001·Granted May 18, 2004·8 cites·6 claims
- 0756US7769556B2Method for correcting measuring errors caused by the lens distortion of an objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Aug 3, 2010·2 cites·8 claims
- 0855US5159912AApparatus for electronic engine control with performance check for the final ignition stageBOSCH GMBH ROBERT·Filed 1989·Granted Nov 3, 1992·9 cites·1 claims
- 0947US7961334B2Coordinate measuring machine for measuring structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 14, 2011·0 cites·5 claims
- 1043US7948635B2Method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 24, 2011·0 cites·9 claims
- 1143US7053388B2Dual-mode electron beam lithography machineLEICA MICROSYS LITHOGRAPHY LTD·Filed 2004·Granted May 30, 2006·1 cites·16 claims
- 1240US8154595B2Device and method for automatic detection of incorrect measurements by means of quality factorsBOESSER HANS-ARTUR·Filed 2008·Granted Apr 10, 2012·0 cites·21 claims
- 1336US7872763B2Device for measuring the position of at least one structure on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jan 18, 2011·0 cites·6 claims
- 1435US2009126525A1Apparatus and method for supporting a substrate at a position with high precisionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →