Inventor · disambiguated record
Naoyuki Osada
Also filed as: OSADA NAOYUKI
10 granted patents·100 citations·filing 1998–2020
83Inventor score
Top patents by PatentIndex Score
10 records- 0188US9378988B2Substrate processing apparatus and substrate processing method using processing solutionOSADA NAOYUKI·Filed 2012·Granted Jun 28, 2016·17 cites·4 claims
- 0285US5962070ASubstrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Oct 5, 1999·80 cites·13 claims
- 0375US10790169B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 29, 2020·2 cites·7 claims
- 0458US9027577B2Nozzle and a substrate processing apparatus including the sameOSADA NAOYUKI·Filed 2007·Granted May 12, 2015·1 cites·12 claims
- 0547US9802227B2Method of cleaning substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Oct 31, 2017·0 cites·6 claims
- 0645US10395952B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 27, 2019·0 cites·5 claims
- 0745US9190300B2Method of cleaning substrate processing apparatusOSADA NAOYUKI·Filed 2012·Granted Nov 17, 2015·0 cites·8 claims
- 0844US11260436B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Mar 1, 2022·0 cites·10 claims
- 0937US10717117B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jul 21, 2020·0 cites·7 claims
- 1034US9740648B2Substrate treatment apparatus that controls respective units by master-slave methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted Aug 22, 2017·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →