Inventor · disambiguated record
Mark Borowicz
Also filed as: BOROWICZ MARK
4 granted patents·1 pending application·77 citations·filing 2005–2014
77Inventor score
Top patents by PatentIndex Score
5 records- 0195US7304302B1Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysisKLA TENCOR TECH CORP·Filed 2005·Granted Dec 4, 2007·55 cites·46 claims
- 0289US7488938B1Charge-control method and apparatus for electron beam imagingKLA TENCOR TECH CORP·Filed 2006·Granted Feb 10, 2009·14 cites·22 claims
- 0377US7365321B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisKLA TENCOR TECH CORP·Filed 2005·Granted Apr 29, 2008·4 cites·39 claims
- 0476US8765496B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisNASSER-GHODSI MEHRAN·Filed 2008·Granted Jul 1, 2014·4 cites·21 claims
- 0560US2014291516A1Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for AnalysisKLA TENCOR TECH CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →