Inventor · disambiguated record
Akihito Minamitsu
Also filed as: MINAMITSU AKIHITO
2 granted patents·41 citations·filing 2001–2001
62Inventor score
Files withULVAC INC2
Top patents by PatentIndex Score
2 records- 0182US6700370B2Apparatus for measuring the thickness of a thin film having eddy current coil sensorULVAC INC·Filed 2001·Granted Mar 2, 2004·34 cites·12 claims
- 0255US6753964B2Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement methodULVAC INC·Filed 2001·Granted Jun 22, 2004·7 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →