Inventor · disambiguated record
Tsuyoshi Naraki
Also filed as: NARAKI TSUYOSHI
13 granted patents·871 citations·filing 1985–2001
94Inventor score
Top patents by PatentIndex Score
13 records- 0198US5579147AScanning light exposure apparatusNIKON CORP·Filed 1994·Granted Nov 26, 1996·491 cites·4 claims
- 0290US6134007AMethod for measuring orthogonality having a third interferometer which is not orthogonalNIKON CORP·Filed 1999·Granted Oct 17, 2000·80 cites·47 claims
- 0390US5625436AScanning type exposure apparatus and exposure methodNIKON CORP·Filed 1996·Granted Apr 29, 1997·73 cites·14 claims
- 0487US4655584ASubstrate positioning apparatusNIPPON KOGAKU KK·Filed 1985·Granted Apr 7, 1987·66 cites·21 claims
- 0586US5581075AMulti-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large areaNIKON CORP·Filed 1995·Granted Dec 3, 1996·64 cites·43 claims
- 0672US5668624AScan type exposure apparatusNIKON CORP·Filed 1994·Granted Sep 16, 1997·24 cites·20 claims
- 0771US5207505AIllumination light source deviceNIKON CORP·Filed 1991·Granted May 4, 1993·39 cites·20 claims
- 0869US6239861B1Exposure method and scanning type exposure apparatusNIKON CORP·Filed 2000·Granted May 29, 2001·10 cites·18 claims
- 0954US6496249B2Exposure apparatusSHARP KK·Filed 2001·Granted Dec 17, 2002·4 cites·20 claims
- 1047US6479832B1Surface height detecting apparatus and exposure apparatus using the sameNIKON CORP·Filed 1999·Granted Nov 12, 2002·11 cites·43 claims
- 1146US6617097B2Exposure methodSHARP KK·Filed 2000·Granted Sep 9, 2003·1 cites·5 claims
- 1240USRE37361EScanning type exposure apparatus and exposure methodNIPPON KOGAKU KK·Filed 1999·Granted Sep 11, 2001·5 cites·61 claims
- 1334US5995225AMethod for measuring orthogonality in a stage of an exposure apparatusNIKON CORP·Filed 1996·Granted Nov 30, 1999·3 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →