Inventor · disambiguated record
Hironori Atsumi
Also filed as: ATSUMI HIRONORI
4 granted patents·3 pending applications·4 citations·filing 2016–2021
60Inventor score
Technology areasH10P
Files withSHOWA DENKO KK7
Top patents by PatentIndex Score
7 records- 0173US11427929B2Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing methodSHOWA DENKO KK·Filed 2016·Granted Aug 30, 2022·2 cites·16 claims
- 0272US11326275B2SiC epitaxial growth apparatus having purge gas supply ports which surround a vicinity of a raw material gas supply portSHOWA DENKO KK·Filed 2019·Granted May 10, 2022·2 cites·7 claims
- 0358US2021217648A1Susceptor and chemical vapor deposition apparatusSHOWA DENKO KK·Filed 2021·Application pending·0 cites
- 0452US2020083085A1Susceptor and chemical vapor deposition apparatusSHOWA DENKO KK·Filed 2019·Application pending·0 cites
- 0544US11390949B2SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial waferSHOWA DENKO KK·Filed 2019·Granted Jul 19, 2022·0 cites·8 claims
- 0640US11424147B2Deposition apparatus having particular arrangement of raw material supply port, partition plate, and opening for measuring a temperatureSHOWA DENKO KK·Filed 2018·Granted Aug 23, 2022·0 cites·14 claims
- 0736US2021066113A1Susceptor, cvd apparatus, and method for manufacturing epitaxial waferSHOWA DENKO KK·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →