Inventor · disambiguated record
Saangrut Sangplung
Also filed as: SANGPLUNG SAANGRUT
8 granted patents·1 pending application·28 citations·filing 2013–2017
82Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0195US10378107B2Low volume showerhead with faceplate holes for improved flow uniformityLAM RES CORP·Filed 2015·Granted Aug 13, 2019·11 cites·26 claims
- 0290US10741365B2Low volume showerhead with porous baffleLAM RES CORP·Filed 2015·Granted Aug 11, 2020·7 cites·20 claims
- 0387US9631276B2Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer depositionLAM RES CORP·Filed 2015·Granted Apr 25, 2017·2 cites·13 claims
- 0479US9920844B2Valve manifold deadleg elimination via reentrant flow pathLAM RES CORP·Filed 2015·Granted Mar 20, 2018·3 cites·34 claims
- 0576US9460915B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2014·Granted Oct 4, 2016·3 cites·8 claims
- 0674US10781516B2Chemical deposition chamber having gas sealLAM RES CORP·Filed 2016·Granted Sep 22, 2020·2 cites·14 claims
- 0755US10323323B2Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer depositionLAM RES CORP·Filed 2017·Granted Jun 18, 2019·0 cites·13 claims
- 0850US9852901B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2016·Granted Dec 26, 2017·0 cites·7 claims
- 0941US2015004798A1Chemical deposition chamber having gas sealLAM RES CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →