Inventor · disambiguated record
Robert L. Wood
Also filed as: WOOD JR ROBERT L · WOOD ROBERT · WOOD ROBERT L · WOOD ROBERT LAVIN
21 granted patents·3 pending applications·682 citations·filing 1980–2019
96Inventor score
Top patents by PatentIndex Score
24 records- 0195US5607824AAntireflective coating for microlithographyIBM·Filed 1994·Granted Mar 4, 1997·61 cites·2 claims
- 0294US6057080ATop antireflective coating filmIBM·Filed 1997·Granted May 2, 2000·86 cites·17 claims
- 0392US5482817AMid and deep-uv antireflection coatings and methods for use thereofIBM·Filed 1994·Granted Jan 9, 1996·70 cites·9 claims
- 0491US6207787B1Antireflective coating for microlithographyIBM·Filed 1998·Granted Mar 27, 2001·51 cites·7 claims
- 0590US5744537AAntireflective coating filmsIBM·Filed 1997·Granted Apr 28, 1998·72 cites·5 claims
- 0690US5401614AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1993·Granted Mar 28, 1995·68 cites·5 claims
- 0790US5380621AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1993·Granted Jan 10, 1995·57 cites·7 claims
- 0888US5554485AMid and deep-UV antireflection coatings and methods for use thereofIBM·Filed 1994·Granted Sep 10, 1996·56 cites·20 claims
- 0981US4564575ATailoring of novolak and diazoquinone positive resists by acylation of novolakIBM·Filed 1984·Granted Jan 14, 1986·33 cites·39 claims
- 1079US4473795ASystem for resist defect measurementIBM·Filed 1983·Granted Sep 25, 1984·30 cites·20 claims
- 1178US9891136B2Methods to determine a bearing settingDEERE & CO·Filed 2015·Granted Feb 13, 2018·2 cites·13 claims
- 1278US5240812ATop coat for acid catalyzed resistsIBM·Filed 1991·Granted Aug 31, 1993·35 cites·8 claims
- 1376US9539334B2Orally dissolving thin films containing allergens and methods of making and useUNIV JOHNS HOPKINS·Filed 2013·Granted Jan 10, 2017·2 cites·7 claims
- 1475US5736301AMethod for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is usedIBM·Filed 1996·Granted Apr 7, 1998·20 cites·3 claims
- 1563US4330614AProcess for forming a patterned resist maskIBM·Filed 1980·Granted May 18, 1982·19 cites·2 claims
- 1655US2019383751A1Methods, devices, systems, and compositions for detecting gasesRESPIRION LLC·Filed 2019·Application pending·0 cites
- 1750US10393666B2Methods, devices, systems, and compositions for detecting gasesRESPIRION LLC·Filed 2013·Granted Aug 27, 2019·1 cites·21 claims
- 1846US6051659AHighly sensitive positive photoresist compositionIBM·Filed 1997·Granted Apr 18, 2000·9 cites·11 claims
- 1942US5273856APositive working photoresist composition containing mid or near UV radiation sensitive quinone diazide and sulfonic acid ester of imide or oxime which does not absorb mid or near UV radiationIBM·Filed 1990·Granted Dec 28, 1993·6 cites·16 claims
- 2038US2013236980A1Methods, Devices, Systems and Compositions for Detecting GasesMORETTI EUGENE W·Filed 2012·Application pending·0 cites
- 2137US5910337APhase-averaging resist coating for reflectivity controlIBM·Filed 1992·Granted Jun 8, 1999·4 cites·11 claims
- 2234US8582107B2Method and system for detecting the level of anesthesia agent in an anesthesia vaporizerSHANG ALLAN BRUCE·Filed 2011·Granted Nov 12, 2013·0 cites·20 claims
- 2328US6153696AProcess for forming carbonates of hydroxyaromatic compoundsIBM·Filed 1993·Granted Nov 28, 2000·0 cites·17 claims
- 2427US2001049071A1Highly sensitive positive photoresist compositionsDAVID PAUL MERRITT·Filed 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →