Inventor · disambiguated record
Masao Furuya
Also filed as: FURUYA MASAO
5 granted patents·1 pending application·132 citations·filing 1981–2008
82Inventor score
Top patents by PatentIndex Score
6 records- 0188US6993919B2Processing apparatus and processing apparatus maintenance methodDAIKIN IND LTD·Filed 2005·Granted Feb 7, 2006·17 cites·3 claims
- 0286US7000416B2Cooling apparatus and plasma processing apparatus having cooling apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Feb 21, 2006·48 cites·14 claims
- 0386US4419003ARecording sheet conveying system of pressure fixing type electrostatic printing apparatusHITACHI LTD·Filed 1981·Granted Dec 6, 1983·32 cites·17 claims
- 0482US6629423B1Processor and temperature control method thereforTOKYO ELECTRON LTD·Filed 2000·Granted Oct 7, 2003·32 cites·14 claims
- 0561US8864932B2Plasma processing apparatus, electrode temperature adjustment device and electrode temperature adjustment methodFURUYA MASAO·Filed 2008·Granted Oct 21, 2014·3 cites·11 claims
- 0645US2006213763A1Temperature control method and apparatus, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →