Inventor · disambiguated record
Y. Sean Lin
Also filed as: LIN Y S · LIN Y SEAN
5 granted patents·8 pending applications·92 citations·filing 1998–2009
82Inventor score
Top patents by PatentIndex Score
13 records- 0188US8010321B2Metrics independent and recipe independent fault classesAPPLIED MATERIALS INC·Filed 2007·Granted Aug 30, 2011·24 cites·29 claims
- 0288US7831326B2Graphical user interface for presenting multivariate fault contributionsAPPLIED MATERIALS INC·Filed 2007·Granted Nov 9, 2010·19 cites·13 claims
- 0383US7765020B2Graphical user interface for presenting multivariate fault contributionsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 27, 2010·12 cites·26 claims
- 0465US5993267ATerminal blockFiled 1998·Granted Nov 30, 1999·28 cites·4 claims
- 0560US6752547B2Liquid delivery system and methodAPPLIED MATERIALS INC·Filed 2002·Granted Jun 22, 2004·9 cites·42 claims
- 0644US2009282296A1Multivariate fault detection improvement for electronic device manufacturingAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0742US2008069954A1Method and apparatus for dispense of chemical vapor in a track lithography toolSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 0841US2007154210A1Method and apparatus for dispense pump calibration in a track lithography systemAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0941US2007254092A1Systems and Methods for Detecting Abnormal Dispense of Semiconductor Process FluidsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1040US2007207259A1Track lithography system with integrated photoresist pump, filter, and buffer vesselAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1140US2007251450A1Systems and Methods for Monitoring and Controlling Dispense Using a Digital Optical SensorAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1239US2007254094A1Method and apparatus for controlling dispense operations in a track lithography toolAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1339US2007272327A1Chemical dispense systemAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →