Inventor · disambiguated record
Ryooji Fukuyama
Also filed as: FUKUYAMA RYOOJI
24 granted patents·2 pending applications·531 citations·filing 1990–2006
97Inventor score
Top patents by PatentIndex Score
26 records- 0190US5276386AMicrowave plasma generating method and apparatusHITACHI LTD·Filed 1991·Granted Jan 4, 1994·66 cites·19 claims
- 0289US5007981AMethod of removing residual corrosive compounds by plasma etching followed by washingHITACHI LTD·Filed 1990·Granted Apr 16, 1991·106 cites·14 claims
- 0387US5868854AMethod and apparatus for processing samplesHITACHI LTD·Filed 1992·Granted Feb 9, 1999·67 cites·45 claims
- 0485US5556714AMethod of treating samplesHITACHI LTD·Filed 1994·Granted Sep 17, 1996·68 cites·12 claims
- 0582US6537415B2Apparatus for processing samplesHITACHI LTD·Filed 2001·Granted Mar 25, 2003·17 cites·9 claims
- 0678US5770100AMethod of treating samplesFiled 1996·Granted Jun 23, 1998·40 cites·8 claims
- 0771US5380397AMethod of treating samplesHITACHI LTD·Filed 1992·Granted Jan 10, 1995·35 cites·21 claims
- 0866US6537417B2Apparatus for processing samplesHITACHI LTD·Filed 2001·Granted Mar 25, 2003·6 cites·16 claims
- 0966US6254721B1Method and apparatus for processing samplesHITACHI LTD·Filed 2000·Granted Jul 3, 2001·6 cites·9 claims
- 1065US5200017ASample processing method and apparatusHITACHI LTD·Filed 1991·Granted Apr 6, 1993·38 cites·13 claims
- 1161US4971651AMicrowave plasma processing method and apparatusHITACHI LTD·Filed 1990·Granted Nov 20, 1990·15 cites·20 claims
- 1253US6656846B2Apparatus for processing samplesHITACHI LTD·Filed 2001·Granted Dec 2, 2003·2 cites·10 claims
- 1352US7396481B2Etching method of organic insulating filmHITACHI LTD·Filed 2005·Granted Jul 8, 2008·0 cites·12 claims
- 1452US7014787B2Etching method of organic insulating filmHITACHI LTD·Filed 2004·Granted Mar 21, 2006·2 cites·4 claims
- 1552US6989228B2Method and apparatus for processing samplesHITACHI LTD·Filed 2001·Granted Jan 24, 2006·3 cites·16 claims
- 1651US6793833B2Etching method of organic insulating filmHITACHI LTD·Filed 2002·Granted Sep 21, 2004·2 cites·14 claims
- 1749US6036816AApparatus for processing a sample having a metal laminateHITACHI LTD·Filed 1995·Granted Mar 14, 2000·8 cites·28 claims
- 1848US7132293B2Method and apparatus for processing samplesHITACHI LTD·Filed 2004·Granted Nov 7, 2006·1 cites·10 claims
- 1947US5952245AMethod for processing samplesHITACHI LTD·Filed 1996·Granted Sep 14, 1999·7 cites·11 claims
- 2045US6329298B1Apparatus for treating samplesHITACHI LTD·Filed 1997·Granted Dec 11, 2001·8 cites·2 claims
- 2145US5900162APlasma etching method and apparatusHITACHI LTD·Filed 1991·Granted May 4, 1999·12 cites·12 claims
- 2244US6165377APlasma etching method and apparatusHITACHI LTD·Filed 1999·Granted Dec 26, 2000·9 cites·2 claims
- 2343US2007037292A1Method and apparatus for processing samplesKOJIMA MASAYUKI·Filed 2006·Application pending·0 cites
- 2438US2005011612A1Plasma etching apparatus and plasma etching methodFiled 2004·Application pending·0 cites
- 2536US6328845B1Plasma-processing method and an apparatus for carrying out the sameHITACHI LTD·Filed 1994·Granted Dec 11, 2001·8 cites·6 claims
- 2635US6077788AMethod and apparatus for processing samplesHITACHI LTD·Filed 1995·Granted Jun 20, 2000·5 cites·6 claims
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