Inventor · disambiguated record
Taketoshi Okajo
Also filed as: OKAJO TAKETOSHI
6 granted patents·2 pending applications·47 citations·filing 2005–2013
81Inventor score
Top patents by PatentIndex Score
8 records- 0190US7646581B2Electrostatic chuckSUMITOMO OSAKA CEMENT CO LTD·Filed 2007·Granted Jan 12, 2010·16 cites·11 claims
- 0288US7582491B2Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Sep 1, 2009·16 cites·16 claims
- 0377US9410753B2Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 9, 2016·5 cites·4 claims
- 0477US8573836B2Apparatus and method for evaluating a substrate mounting deviceSASAKI YASUHARU·Filed 2007·Granted Nov 5, 2013·6 cites·8 claims
- 0573US8999068B2Chamber cleaning methodHONDA MASANOBU·Filed 2010·Granted Apr 7, 2015·3 cites·8 claims
- 0662US7592569B2Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded thereinTOKYO ELECTRON LTD·Filed 2005·Granted Sep 22, 2009·1 cites·6 claims
- 0746US2008212640A1Apparatus and method for testing a temperature monitoring substrateTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0845US2010122774A1Substrate mounting table and substrate processing apparatus having sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →