Inventor · disambiguated record
Tsukasa Azuma
Also filed as: AZUMA TSUKASA
31 granted patents·5 pending applications·572 citations·filing 1993–2019
97Inventor score
Top patents by PatentIndex Score
36 records- 0193US5879853ATop antireflective coating material and its process for DUV and VUV lithography systemsTOSHIBA KK·Filed 1996·Granted Mar 9, 1999·100 cites·5 claims
- 0290US5998100AFabrication process using a multi-layer antireflective layerTOSHIBA KK·Filed 1997·Granted Dec 7, 1999·89 cites·5 claims
- 0390US5815247AAvoidance of pattern shortening by using off axis illumination with dipole and polarizing aperturesSIEMENS AG·Filed 1995·Granted Sep 29, 1998·90 cites·9 claims
- 0487US5759746AFabrication process using a thin resistTOSHIBA KK·Filed 1996·Granted Jun 2, 1998·75 cites·17 claims
- 0582US5712698AIndependently controllable shutters and variable area apertures for off axis illuminationSIEMENS AG·Filed 1996·Granted Jan 27, 1998·52 cites·10 claims
- 0681US6576375B1PhotomaskTOSHIBA KK·Filed 2000·Granted Jun 10, 2003·24 cites·17 claims
- 0779US8512488B2Ni—Fe based forging superalloy excellent in high-temperature strength and high-temperature ductility, method of manufacturing the same, and steam turbine rotorIMANO SHINYA·Filed 2007·Granted Aug 20, 2013·3 cites·6 claims
- 0877US9073284B2Method of forming pattern and laminateHIENO ATSUSHI·Filed 2012·Granted Jul 7, 2015·3 cites·19 claims
- 0966US8119313B2Method for manufacturing semiconductor deviceKOBAYASHI KATSUTOSHI·Filed 2010·Granted Feb 21, 2012·2 cites·20 claims
- 1066US6846750B1High precision pattern forming method of manufacturing a semiconductor deviceTOSHIBA KK·Filed 2000·Granted Jan 25, 2005·9 cites·8 claims
- 1162US5487082AElectrode for electroslag remelting and process of producing alloy using the sameJAPAN STEEL WORKS LTD·Filed 1994·Granted Jan 23, 1996·17 cites·8 claims
- 1261US9291908B2Method of forming pattern and laminateTOSHIBA KK·Filed 2015·Granted Mar 22, 2016·0 cites·16 claims
- 1360US6051369ALithography process using one or more anti-reflective coating films and fabrication process using the lithography processTOSHIBA KK·Filed 1998·Granted Apr 18, 2000·25 cites·6 claims
- 1460US5444732AElectrode for electroslag remelting and process of producing alloy using the sameJAPAN STEEL WORKS LTD·Filed 1994·Granted Aug 22, 1995·8 cites·8 claims
- 1557US9040123B2Pattern formation methodTOSHIBA KK·Filed 2013·Granted May 26, 2015·0 cites·12 claims
- 1657US6096484APattern forming method using chemically amplified resist and apparatus for treating chemically amplified resistTOSHIBA KK·Filed 1997·Granted Aug 1, 2000·16 cites·13 claims
- 1756US7820098B2High Cr ferritic heat resistance steelJAPAN STEEL WORKS LTD·Filed 2001·Granted Oct 26, 2010·2 cites·4 claims
- 1855US9034121B2Low alloy steel for geothermal power generation turbine rotor, and low alloy material for geothermal power generation turbine rotor and method for manufacturing the sameOHSAKI SATORU·Filed 2012·Granted May 19, 2015·0 cites·8 claims
- 1952US8999078B2Forging heat resistant steel, manufacturing method thereof, forged parts and manufacturing method thereofYAMADA MASAYUKI·Filed 2011·Granted Apr 7, 2015·0 cites·12 claims
- 2051US5879863APattern forming methodTOSHIBA KK·Filed 1997·Granted Mar 9, 1999·12 cites·17 claims
- 2150US10950439B2Pattern forming methodTOSHIBA MEMORY CORP·Filed 2019·Granted Mar 16, 2021·0 cites·20 claims
- 2250US5560788AHeat resisting steelsJAPAN STEEL WORKS LTD·Filed 1995·Granted Oct 1, 1996·10 cites·4 claims
- 2349US5524019AElectrode for electroslag remelting and process of producing alloy using the sameJAPAN STEEL WORKS LTD·Filed 1993·Granted Jun 4, 1996·10 cites·3 claims
- 2445US8980755B2Method of pattern formationTOSHIBA KK·Filed 2013·Granted Mar 17, 2015·0 cites·15 claims
- 2545US5716468AProcess for producing high-and low-pressure integral-type turbine rotorJAPAN STEEL WORKS LTD·Filed 1995·Granted Feb 10, 1998·21 cites·3 claims
- 2644US9797034B2High strength and high toughness cast steel material and method for producing the sameGOTOH YOSHIHIRO·Filed 2010·Granted Oct 24, 2017·0 cites·13 claims
- 2743US2004192034A1Method of manufacturing semiconductor deviceTOKYO SHIBAURA ELECTRIC CO·Filed 2004·Application pending·0 cites
- 2842US2003185700A1Heat-resisting steel and method of manufacturing the sameJAPAN STEEL WORKS LTD·Filed 2002·Application pending·0 cites
- 2941US8609014B2Template manufacturing method, semiconductor device manufacturing method and templateAZUMA TSUKASA·Filed 2011·Granted Dec 17, 2013·0 cites·9 claims
- 3041US2008318166A1Method of manufacturing semiconductor deviceAZUMA TSUKASA·Filed 2008·Application pending·0 cites
- 3140US9108342B2Method of forming film, method of forming pattern, and method of manufacturing semiconductor deviceAZUMA TSUKASA·Filed 2012·Granted Aug 18, 2015·0 cites·23 claims
- 3238US2012214272A1Method of manufacturing organic thin film solar cellAZUMA TSUKASA·Filed 2011·Application pending·0 cites
- 3336US6279502B1Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor deviceTOSHIBA KK·Filed 1998·Granted Aug 28, 2001·3 cites·1 claims
- 3434US8808973B2Method of forming patternMIKOSHIBA SATOSHI·Filed 2012·Granted Aug 19, 2014·0 cites·6 claims
- 3532US5866303AResist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor deviceTOSHIBA KK·Filed 1997·Granted Feb 2, 1999·1 cites·8 claims
- 3632US2011059402A1Exposure methodAZUMA TSUKASA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →