Inventor · disambiguated record
Charles T. Carlson
Also filed as: CARLSON CHARLES · CARLSON CHARLES T
78 granted patents·10 pending applications·728 citations·filing 1998–2024
99Inventor score
Files withAPPLIED MATERIALS INC52VARIAN SEMICONDUCTOR EQUIPMENT ASS INC10VARIAN SEMICONDUCTOR EQUIPMENT8ISHIKAWA TETSUYA5RICE MIKE4
Top patents by PatentIndex Score
88 records- 0199US11117265B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Sep 14, 2021·9 cites·19 claims
- 0298US11476135B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·5 cites·20 claims
- 0398US11355367B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·9 cites·20 claims
- 0498US11189460B1System, apparatus and method for variable length electrode in linear acceleratorAPPLIED MATERIALS INC·Filed 2020·Granted Nov 30, 2021·5 cites·20 claims
- 0598US7925377B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 12, 2011·45 cites·3 claims
- 0698US7743728B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·36 cites·16 claims
- 0798US7694647B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·42 cites·19 claims
- 0898US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0997US11596051B2Resonator, linear accelerator configuration and ion implantation system having toroidal resonatorAPPLIED MATERIALS INC·Filed 2020·Granted Feb 28, 2023·4 cites·18 claims
- 1097US11574826B2High-density substrate processing systems and methodsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 7, 2023·5 cites·14 claims
- 1196US11812539B2Resonator, linear accelerator configuration and ion implantation system having rotating exciterAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·4 cites·19 claims
- 1296US10854483B2High pressure steam anneal processing apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·15 cites·20 claims
- 1396US10643867B2Annealing system and methodAPPLIED MATERIALS INC·Filed 2018·Granted May 5, 2020·17 cites·18 claims
- 1496US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 1595US11590662B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2021·Granted Feb 28, 2023·2 cites·16 claims
- 1695US8550031B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Granted Oct 8, 2013·13 cites·10 claims
- 1795US7819079B2Cartesian cluster tool configuration for lithography type processesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 26, 2010·26 cites·11 claims
- 1895US7651306B2Cartesian robot cluster tool architectureAPPLIED MATERIALS INC·Filed 2005·Granted Jan 26, 2010·50 cites·23 claims
- 1994US11443973B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Sep 13, 2022·3 cites·20 claims
- 2094US9082799B2System and method for 2D workpiece alignmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Jul 14, 2015·20 cites·12 claims
- 2194US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 2294US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 2392US8066466B2Substrate processing sequence in a Cartesian robot cluster toolRICE MIKE·Filed 2010·Granted Nov 29, 2011·13 cites·17 claims
- 2491US7374393B2Method of retaining a substrate during a substrate transferring processAPPLIED MATERIALS INC·Filed 2006·Granted May 20, 2008·17 cites·4 claims
- 2589US7694688B2Wet clean system designAPPLIED MATERIALS INC·Filed 2007·Granted Apr 13, 2010·20 cites·24 claims
- 2688US11094504B2Resonator coil having an asymmetrical profileAPPLIED MATERIALS INC·Filed 2020·Granted Aug 17, 2021·2 cites·19 claims
- 2788US6146504ASubstrate support and lift apparatus and methodAPPLIED MATERIALS INC·Filed 1998·Granted Nov 14, 2000·88 cites·33 claims
- 2887US7798764B2Substrate processing sequence in a cartesian robot cluster toolAPPLIED MATERIALS INC·Filed 2006·Granted Sep 21, 2010·22 cites·19 claims
- 2987US6315878B1Substrate support and lift apparatus and methodAPPLIED MATERIALS INC·Filed 2000·Granted Nov 13, 2001·38 cites·19 claims
- 3085US8911193B2Substrate processing sequence in a cartesian robot cluster toolRICE MIKE·Filed 2011·Granted Dec 16, 2014·12 cites·7 claims
- 3185US7374391B2Substrate gripper for a substrate handling robotAPPLIED MATERIALS INC·Filed 2005·Granted May 20, 2008·9 cites·12 claims
- 3283US10361104B2Ambient controlled transfer module and process systemAPPLIED MATERIALS INC·Filed 2017·Granted Jul 23, 2019·3 cites·13 claims
- 3383US9004564B2Wafer handling apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 14, 2015·5 cites·15 claims
- 3483US8173527B2Stepped masking for patterned implantationRIORDON BENJAMIN B·Filed 2010·Granted May 8, 2012·5 cites·12 claims
- 3582US8698104B2System and method for handling multiple workpieces for matrix configuration processingWEAVER WILLIAM T·Filed 2010·Granted Apr 15, 2014·7 cites·11 claims
- 3680US12279359B2Linear accelerator assembly including flexible high-voltage connectionAPPLIED MATERIALS INC·Filed 2024·Granted Apr 15, 2025·0 cites·17 claims
- 3780US9490153B2Mechanical alignment of substrates to a maskVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Nov 8, 2016·6 cites·15 claims
- 3879US12144101B2Resonator, linear accelerator configuration and ion implantation system having rotating exciterAPPLIED MATERIALS INC·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
- 3978US10957512B1Method and device for a carrier proximity maskAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·2 cites·20 claims
- 4075US12249522B2Processing chamber with annealing mini-environmentAPPLIED MATERIALS INC·Filed 2023·Granted Mar 11, 2025·0 cites·11 claims
- 4175US12185451B2Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamberAPPLIED MATERIALS INC·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 4274US11710617B2Resonator coil having an asymmetrical profileAPPLIED MATERIALS INC·Filed 2021·Granted Jul 25, 2023·0 cites·19 claims
- 4374US8330128B2Implant mask with moveable hinged mask segmentsVOPAT ROBERT B·Filed 2010·Granted Dec 11, 2012·4 cites·19 claims
- 4473US12308206B2Three layer resonator coil for linear acceleratorAPPLIED MATERIALS INC·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 4572US9694989B2Workpiece handling system and methods of workpiece handlingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2012·Granted Jul 4, 2017·2 cites·11 claims
- 4671US12074042B2High-density substrate processing systems and methodsAPPLIED MATERIALS INC·Filed 2023·Granted Aug 27, 2024·0 cites·18 claims
- 4771US11895766B2Linear accelerator assembly including flexible high-voltage connectionAPPLIED MATERIALS INC·Filed 2021·Granted Feb 6, 2024·0 cites·17 claims
- 4870US12170220B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2022·Granted Dec 17, 2024·0 cites·20 claims
- 4970US11948817B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2022·Granted Apr 2, 2024·0 cites·20 claims
- 5070US9412638B2End effector padsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Aug 9, 2016·2 cites·5 claims
Showing the top 50 of 88 patent records by PatentIndex Score.
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