Inventor · disambiguated record
Cody Barnett
Also filed as: BARNETT CODY
4 granted patents·3 pending applications·402 citations·filing 2013–2023
74Inventor score
Top patents by PatentIndex Score
7 records- 0198US9449795B2Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactorNOVELLUS SYSTEMS INC·Filed 2013·Granted Sep 20, 2016·398 cites·22 claims
- 0276US9460915B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2014·Granted Oct 4, 2016·3 cites·8 claims
- 0350US9852901B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2016·Granted Dec 26, 2017·0 cites·7 claims
- 0448US2025154644A1High pressure inert oxidation and in-situ annealing process to improve film seam quality and werLAM RES CORP·Filed 2023·Application pending·0 cites
- 0547US2025230546A1Selective control of multi-station processing chamber componentsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0644US2016056032A1Methods and apparatuses for stable deposition rate control in low temperature ald systems by showerhead active heating and/or pedestal coolingLAM RES CORP·Filed 2014·Application pending·0 cites
- 0743USD1073758SBaffle for substrate processing systemLAM RES CORP·Filed 2022·Granted May 6, 2025·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →