Inventor · disambiguated record
Michael J. Sershen
Also filed as: SERSHEN MICHAEL · SERSHEN MICHAEL J
7 granted patents·2 pending applications·9 citations·filing 2011–2020
77Inventor score
Top patents by PatentIndex Score
9 records- 0187US9567670B2Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter rangeULTRATECH INC·Filed 2014·Granted Feb 14, 2017·3 cites·13 claims
- 0278US9783888B2Atomic layer deposition headULTRATECH INC·Filed 2015·Granted Oct 10, 2017·1 cites·15 claims
- 0366US10844488B2Chuck systems and methods having enhanced electrical isolation for substrate-biased ALDVEECO INSTR INC·Filed 2018·Granted Nov 24, 2020·1 cites·15 claims
- 0464US10351950B2Plasma enhanced ALD systemULTRATECH INC·Filed 2014·Granted Jul 16, 2019·0 cites·10 claims
- 0564US2019284689A1Plasma Enhanced ALD SystemULTRATECH INC·Filed 2019·Application pending·0 cites
- 0660US2012141676A1Ald coating systemSERSHEN MICHAEL J·Filed 2011·Application pending·0 cites
- 0737US12400894B2Automated batch production thin film deposition systems and methods of using the sameVEECO INSTR INC·Filed 2020·Granted Aug 26, 2025·0 cites·5 claims
- 0834USD908102STransportable semiconductor wafer rackVEECO INSTR INC·Filed 2019·Granted Jan 19, 2021·2 cites·1 claims
- 0934USD908103STransportable semiconductor wafer rackVEECO INSTR INC·Filed 2019·Granted Jan 19, 2021·2 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →