Inventor · disambiguated record
Cédric Désiré Grouwstra
Also filed as: GROUWSTRA CEDRIC DESIRE · GROUWSTRA CÉDRIC DÉSIRÉ
30 granted patents·1 pending application·187 citations·filing 2004–2023
96Inventor score
Files withASML NETHERLANDS BV22JANSEN HANS3DE VRIES DIRK1DEN BOEF ARIE JEFFREY MARIA1GROUWSTRA CÉDRIC DÉSIRÉ1
Top patents by PatentIndex Score
31 records- 0198US8760662B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2013·Granted Jun 24, 2014·16 cites·7 claims
- 0298US7791732B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2005·Granted Sep 7, 2010·80 cites·15 claims
- 0397US8054467B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2010·Granted Nov 8, 2011·15 cites·13 claims
- 0493US8553230B2Method and apparatus for angular-resolved spectroscopic lithography characterizationDEN BOEF ARIE JEFFREY MARIA·Filed 2011·Granted Oct 8, 2013·10 cites·8 claims
- 0592US10955353B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2019·Granted Mar 23, 2021·2 cites·7 claims
- 0692US9703210B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jul 11, 2017·4 cites·18 claims
- 0792US7880860B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 1, 2011·31 cites·29 claims
- 0890US10241055B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2014·Granted Mar 26, 2019·3 cites·11 claims
- 0990US8941811B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jan 27, 2015·4 cites·21 claims
- 1089US8638419B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jan 28, 2014·4 cites·20 claims
- 1186US9329491B2Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatusGROUWSTRA CÉDRIC DÉSIRÉ·Filed 2011·Granted May 3, 2016·7 cites·21 claims
- 1283US8115899B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2007·Granted Feb 14, 2012·4 cites·31 claims
- 1381US11782349B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Oct 10, 2023·0 cites·20 claims
- 1481US11448973B2Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2018·Granted Sep 20, 2022·2 cites·21 claims
- 1578US11525786B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2021·Granted Dec 13, 2022·0 cites·4 claims
- 1677US11592753B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 1777US10877381B2Methods of determining corrections for a patterning processASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·1 cites·20 claims
- 1872US11327407B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted May 10, 2022·0 cites·20 claims
- 1971US8330936B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2006·Granted Dec 11, 2012·3 cites·20 claims
- 2069US12078935B2Device manufacturing methodsASML NETHERLANDS BV·Filed 2022·Granted Sep 3, 2024·0 cites·20 claims
- 2169US11520238B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 2269US2022365446A1Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2364US10509326B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Dec 17, 2019·0 cites·20 claims
- 2459US9036127B2Lithographic apparatusVAN DEN DUNGEN CLEMENS JOHANNES GERARDUS·Filed 2009·Granted May 19, 2015·1 cites·20 claims
- 2558US10649341B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 12, 2020·0 cites·22 claims
- 2657US11442366B2Device manufacturing methodsASML NETHERLANDS BV·Filed 2018·Granted Sep 13, 2022·0 cites·20 claims
- 2756US11150562B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2018·Granted Oct 19, 2021·0 cites·20 claims
- 2855US9964865B2Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 8, 2018·0 cites·20 claims
- 2955US9465302B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 11, 2016·0 cites·20 claims
- 3037US8129097B2Immersion lithographyDE VRIES DIRK·Filed 2008·Granted Mar 6, 2012·0 cites·18 claims
- 3134US8435593B2Method of inspecting a substrate and method of preparing a substrate for lithographyVANGHELUWE RIK TEODOOR·Filed 2007·Granted May 7, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →