Inventor · disambiguated record
Tadashi Otaka
Also filed as: OTAKA TADASHI
55 granted patents·3 pending applications·1,351 citations·filing 1987–2009
99Inventor score
Top patents by PatentIndex Score
58 records- 0198US5412210AScanning electron microscope and method for production of semiconductor device by using the sameHITACHI LTD·Filed 1993·Granted May 2, 1995·148 cites·70 claims
- 0294US8334520B2Charged particle beam apparatusOTAKA TADASHI·Filed 2009·Granted Dec 18, 2012·53 cites·19 claims
- 0394US5412209AElectron beam apparatusHITACHI LTD·Filed 1992·Granted May 2, 1995·105 cites·32 claims
- 0493US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 0593US6114695AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1999·Granted Sep 5, 2000·62 cites·4 claims
- 0691US6791084B2Method and scanning electron microscope for measuring dimension of material on sampleHITACHI HIGH TECH CORP·Filed 2002·Granted Sep 14, 2004·51 cites·7 claims
- 0791US5598002AElectron beam apparatusHITACHI LTD·Filed 1996·Granted Jan 28, 1997·68 cites·11 claims
- 0891US5594245AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1995·Granted Jan 14, 1997·71 cites·20 claims
- 0991US5389787AScanning electron microscopeHITACHI LTD·Filed 1993·Granted Feb 14, 1995·65 cites·12 claims
- 1090US7369703B2Method and apparatus for circuit pattern inspectionHITACHI LTD·Filed 2006·Granted May 6, 2008·10 cites·22 claims
- 1189US5324950ACharged particle beam apparatusHITACHI LTD·Filed 1992·Granted Jun 28, 1994·59 cites·38 claims
- 1288US5969357AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Oct 19, 1999·43 cites·20 claims
- 1388US5442183ACharged particle beam apparatus including means for maintaining a vacuum sealHITACHI LTD·Filed 1993·Granted Aug 15, 1995·47 cites·9 claims
- 1486US7340111B2Image evaluation method and microscopeHITACHI LTD·Filed 2005·Granted Mar 4, 2008·6 cites·5 claims
- 1586US7095884B2Method and apparatus for circuit pattern inspectionHITACHI LTD·Filed 2002·Granted Aug 22, 2006·22 cites·6 claims
- 1686US7034296B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2001·Granted Apr 25, 2006·24 cites·17 claims
- 1785US7236651B2Image evaluation method and microscopeHITACHI LTD·Filed 2002·Granted Jun 26, 2007·16 cites·20 claims
- 1885US7022983B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Apr 4, 2006·15 cites·18 claims
- 1985US5254856ACharged particle beam apparatus having particular electrostatic objective lens and vacuum pump systemsHITACHI LTD·Filed 1991·Granted Oct 19, 1993·43 cites·57 claims
- 2084US7315024B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 1, 2008·5 cites·17 claims
- 2183US5866904AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Feb 2, 1999·42 cites·24 claims
- 2283US5276325AScanning microscope and a method of operating such a scanning microscopeHITACHI LTD·Filed 1992·Granted Jan 4, 1994·40 cites·28 claims
- 2382US7910886B2Sample dimension measuring method and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 22, 2011·6 cites·7 claims
- 2482US7838827B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 23, 2010·4 cites·7 claims
- 2582USD332616SElectronic microscopeHITACHI LTD·Filed 1990·Granted Jan 19, 1993·23 cites·1 claims
- 2679US6274876B1Inspection apparatus and method using particle beam and the particle-beam-applied apparatusHITACHI LTD·Filed 2000·Granted Aug 14, 2001·14 cites·11 claims
- 2778US7805023B2Image evaluation method and microscopeHITACHI LTD·Filed 2007·Granted Sep 28, 2010·3 cites·20 claims
- 2878US7800059B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 21, 2010·3 cites·6 claims
- 2978US5387793AScanning electron microscopeHITACHI LTD·Filed 1993·Granted Feb 7, 1995·31 cites·9 claims
- 3077US6653634B1Method of measuring length with scanning type electron microscopeHITACHI LTD·Filed 2000·Granted Nov 25, 2003·12 cites·11 claims
- 3176US7605381B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Oct 20, 2009·9 cites·7 claims
- 3276US6667483B2Apparatus using charged particle beamHITACHI LTD·Filed 2001·Granted Dec 23, 2003·13 cites·18 claims
- 3375US7659508B2Method for measuring dimensions of sample and scanning electron microscopeHITACHI LTD·Filed 2002·Granted Feb 9, 2010·11 cites·11 claims
- 3475US5149967ACharged-particle beam apparatusHITACHI LTD·Filed 1990·Granted Sep 22, 1992·26 cites·60 claims
- 3573US7361894B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 22, 2008·6 cites·10 claims
- 3673US5614713AScanning electron microscopeHITACHI LTD·Filed 1996·Granted Mar 25, 1997·26 cites·10 claims
- 3772US7476856B2Sample dimension-measuring method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 13, 2009·10 cites·2 claims
- 3869US6140644AInspection apparatus and method using a particle beamHITACHI LTD·Filed 1998·Granted Oct 31, 2000·28 cites·12 claims
- 3969US4889995AApparatus for analysis employing electronHITACHI LTD·Filed 1988·Granted Dec 26, 1989·16 cites·11 claims
- 4068US7285777B2Sample dimension measuring method and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 23, 2007·13 cites·13 claims
- 4166US8324594B2Charged particle beam apparatusITO HIROYUKI·Filed 2009·Granted Dec 4, 2012·1 cites·8 claims
- 4263US7164126B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 16, 2007·5 cites·1 claims
- 4363US2010006755A1Charged particle beam alignment method and charged particle beam apparatusSATO MITSUGO·Filed 2009·Application pending·0 cites
- 4461US6933500B2Electron microscopeHITACHI LTD·Filed 2003·Granted Aug 23, 2005·3 cites·10 claims
- 4557US8080789B2Sample dimension measuring method and scanning electron microscopeNASU OSAMU·Filed 2009·Granted Dec 20, 2011·0 cites·4 claims
- 4657US5026995AParticle beam surface analyzerHITACHI LTD·Filed 1990·Granted Jun 25, 1991·19 cites·12 claims
- 4754US2005167589A1Electron microscopeHITACHI LTD·Filed 2005·Application pending·0 cites
- 4853US7385196B2Method and scanning electron microscope for measuring width of material on sampleHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 10, 2008·2 cites·4 claims
- 4953US5912462AElectron microscopeHITACHI LTD·Filed 1996·Granted Jun 15, 1999·10 cites·8 claims
- 5053US2005127295A1Electron microscopeHITACHI LTD·Filed 2005·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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