Inventor · disambiguated record
Sadayuki Okudaira
Also filed as: OKUDAIRA SADAYUKI
33 granted patents·3,133 citations·filing 1977–2002
98Inventor score
Top patents by PatentIndex Score
33 records- 0199US4985114ADry etching by alternately etching and depositingHITACHI LTD·Filed 1989·Granted Jan 15, 1991·601 cites·8 claims
- 0299US4857137AProcess for surface treatmentHITACHI LTD·Filed 1987·Granted Aug 15, 1989·520 cites·17 claims
- 0399US4579623AMethod and apparatus for surface treatment by plasmaHITACHI LTD·Filed 1984·Granted Apr 1, 1986·654 cites·33 claims
- 0498US4481229AMethod for growing silicon-including film by employing plasma depositionHITACHI LTD·Filed 1983·Granted Nov 6, 1984·143 cites·15 claims
- 0597US4992136ADry etching methodHITACHI LTD·Filed 1988·Granted Feb 12, 1991·259 cites·9 claims
- 0695US4599135AThin film depositionHITACHI LTD·Filed 1984·Granted Jul 8, 1986·82 cites·28 claims
- 0794US4559100AMicrowave plasma etching apparatusHITACHI LTD·Filed 1984·Granted Dec 17, 1985·43 cites·8 claims
- 0893US4609426AMethod and apparatus for monitoring etchingHITACHI LTD·Filed 1985·Granted Sep 2, 1986·63 cites·11 claims
- 0993US4433228AMicrowave plasma sourceHITACHI LTD·Filed 1981·Granted Feb 21, 1984·43 cites·20 claims
- 1092US4563240AMethod and apparatus for plasma processHITACHI LTD·Filed 1984·Granted Jan 7, 1986·117 cites·12 claims
- 1191US4101411APlasma etching apparatusHITACHI LTD·Filed 1977·Granted Jul 18, 1978·33 cites·7 claims
- 1289US4330384AProcess for plasma etchingHITACHI LTD·Filed 1979·Granted May 18, 1982·52 cites·28 claims
- 1384US5580420APlasma generating method and apparatus and plasma processing method and apparatusHITACHI LTD·Filed 1994·Granted Dec 3, 1996·39 cites·52 claims
- 1484US4462863AMicrowave plasma etchingHITACHI LTD·Filed 1983·Granted Jul 31, 1984·59 cites·12 claims
- 1582US4298419ADry etching apparatusHITACHI LTD·Filed 1980·Granted Nov 3, 1981·39 cites·4 claims
- 1675US5354416ADry etching methodOKUDAIRA SADAYUKI·Filed 1990·Granted Oct 11, 1994·67 cites·26 claims
- 1774US4943344AEtching methodHITACHI LTD·Filed 1989·Granted Jul 24, 1990·41 cites·7 claims
- 1872US4986877AMethod of dry etchingHITACHI LTD·Filed 1988·Granted Jan 22, 1991·37 cites·16 claims
- 1965US4705595AMethod for microwave plasma processingHITACHI LTD·Filed 1985·Granted Nov 10, 1987·32 cites·10 claims
- 2064US4624214ADry-processing apparatusHITACHI LTD·Filed 1985·Granted Nov 25, 1986·30 cites·9 claims
- 2160US5874013ASemiconductor integrated circuit arrangement fabrication methodHITACHI LTD·Filed 1997·Granted Feb 23, 1999·18 cites·99 claims
- 2260US5147500ADry etching methodHITACHI LTD·Filed 1990·Granted Sep 15, 1992·32 cites·16 claims
- 2359US4430138AMicrowave plasma etching apparatus having fan-shaped dischargeHITACHI LTD·Filed 1980·Granted Feb 7, 1984·21 cites·1 claims
- 2457US4844767AMethod of and apparatus for etchingHITACHI LTD·Filed 1988·Granted Jul 4, 1989·25 cites·13 claims
- 2556US5643473ADry etching methodHITACHI LTD·Filed 1995·Granted Jul 1, 1997·21 cites·11 claims
- 2654US6309980B1Semiconductor integrated circuit arrangement fabrication methodHITACHI LTD·Filed 2000·Granted Oct 30, 2001·4 cites·61 claims
- 2753US5127987AContinuous etching process and apparatus thereforKOKUSAI ELECTRIC CO LTD·Filed 1990·Granted Jul 7, 1992·12 cites·10 claims
- 2851US6767782B2Manufacturing method of semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Jul 27, 2004·5 cites·18 claims
- 2946US6074958ASemiconductor integrated circuit arrangement fabrication methodHITACHI LTD·Filed 1999·Granted Jun 13, 2000·9 cites·9 claims
- 3046US5705029ADry etching methodHITACHI LTD·Filed 1995·Granted Jan 6, 1998·13 cites·8 claims
- 3145US5962347ASemiconductor integrated circuit arrangement fabrication methodHITACHI LTD·Filed 1998·Granted Oct 5, 1999·8 cites·33 claims
- 3243US4436581AUniform etching of silicon (doped and undoped) utilizing ionsHITACHI LTD·Filed 1982·Granted Mar 13, 1984·11 cites·11 claims
- 3337USRE39895ESemiconductor integrated circuit arrangement fabrication methodRENESAS TECH CORP·Filed 2002·Granted Oct 23, 2007·0 cites·35 claims
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