Inventor · disambiguated record
Alexei Marakhatanov
Also filed as: MARAKHATANOV ALEXEI
5 granted patents·34 citations·filing 2011–2022
77Inventor score
Top patents by PatentIndex Score
5 records- 0192US9881772B2Multi-radiofrequency impedance control for plasma uniformity tuningMARAKHATANOV ALEXEI·Filed 2012·Granted Jan 30, 2018·24 cites·15 claims
- 0291US10720314B2Confinement ring for use in a plasma processing systemLAM RES CORP·Filed 2017·Granted Jul 21, 2020·5 cites·22 claims
- 0390US11342166B2Confinement ring for use in a plasma processing systemLAM RES CORP·Filed 2020·Granted May 24, 2022·2 cites·18 claims
- 0478US11791140B2Confinement ring for use in a plasma processing systemLAM RES CORP·Filed 2022·Granted Oct 17, 2023·0 cites·6 claims
- 0574US9117767B2Negative ion control for dielectric etchMARAKHATANOV ALEXEI·Filed 2011·Granted Aug 25, 2015·3 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →