Inventor · disambiguated record
Igor V. Fomenkov
Also filed as: FOMENKOV IGOR · FOMENKOV IGOR V · FOMENKOV IGOR VLADIMIROVICH · LARSON DONALD G
163 granted patents·7 pending applications·7,163 citations·filing 1993–2025
99Inventor score
Top patents by PatentIndex Score
170 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0299US6005879APulse energy control for excimer laserCYMER INC·Filed 1998·Granted Dec 21, 1999·231 cites·13 claims
- 0398US8263953B2Systems and methods for target material delivery protection in a laser produced plasma EUV light sourceFOMENKOV IGOR V·Filed 2011·Granted Sep 11, 2012·43 cites·21 claims
- 0498US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0598US7655925B2Gas management system for a laser-produced-plasma EUV light sourceCYMER INC·Filed 2007·Granted Feb 2, 2010·43 cites·20 claims
- 0698US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 0798US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 0898US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0998US6566667B1Plasma focus light source with improved pulse power systemCYMER INC·Filed 2000·Granted May 20, 2003·185 cites·22 claims
- 1098US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 1198US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 1298US5771258AAerodynamic chamber design for high pulse repetition rate excimer lasersCYMER INC·Filed 1997·Granted Jun 23, 1998·187 cites·14 claims
- 1398US5729562APulse power generating circuit with energy recoveryCYMER INC·Filed 1996·Granted Mar 17, 1998·241 cites·64 claims
- 1497US8198615B2Gas management system for a laser-produced-plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2010·Granted Jun 12, 2012·21 cites·20 claims
- 1597US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 1697US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 1797US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 1897US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 1997US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 2097US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 2197US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 2297US6493374B1Smart laser with fast deformable gratingCYMER INC·Filed 2000·Granted Dec 10, 2002·90 cites·22 claims
- 2397US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 2497US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 2597US6094448AGrating assembly with bi-directional bandwidth controlCYMER INC·Filed 1999·Granted Jul 25, 2000·194 cites·8 claims
- 2696US8680495B1Extreme ultraviolet light sourceCYMER INC·Filed 2013·Granted Mar 25, 2014·17 cites·18 claims
- 2796US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 2896US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 2996US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 3096US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
- 3196US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 3296US6566668B2Plasma focus light source with tandem ellipsoidal mirror unitsCYMER INC·Filed 2001·Granted May 20, 2003·131 cites·27 claims
- 3396US6538737B2High resolution etalon-grating spectrometerCYMER INC·Filed 2001·Granted Mar 25, 2003·109 cites·8 claims
- 3496US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 3595US8872144B1System and method for laser beam focus control for extreme ultraviolet laser produced plasma sourceCymer LLC·Filed 2013·Granted Oct 28, 2014·18 cites·13 claims
- 3695US8791440B1Target for extreme ultraviolet light sourceCYMER INC·Filed 2013·Granted Jul 29, 2014·25 cites·29 claims
- 3795US8653437B2EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periodsPARTLO WILLIAM N·Filed 2011·Granted Feb 18, 2014·20 cites·21 claims
- 3895US8000212B2Metrology for extreme ultraviolet light sourceCYMER INC·Filed 2009·Granted Aug 16, 2011·25 cites·31 claims
- 3995US7642533B2Extreme ultraviolet light sourceCYMER INC·Filed 2007·Granted Jan 5, 2010·36 cites·20 claims
- 4095US7630424B2Laser systemCYMER INC·Filed 2007·Granted Dec 8, 2009·24 cites·24 claims
- 4195US6815700B2Plasma focus light source with improved pulse power systemCYMER INC·Filed 2002·Granted Nov 9, 2004·113 cites·40 claims
- 4295US6529531B1Fast wavelength correction technique for a laserCYMER INC·Filed 2000·Granted Mar 4, 2003·86 cites·12 claims
- 4395US6452199B1Plasma focus high energy photon source with blast shieldCYMER INC·Filed 1999·Granted Sep 17, 2002·134 cites·39 claims
- 4495US6064072APlasma focus high energy photon sourceCYMER INC·Filed 1999·Granted May 16, 2000·190 cites·25 claims
- 4595US5978391AWavelength reference for excimer laserCYMER INC·Filed 1997·Granted Nov 2, 1999·123 cites·15 claims
- 4694US10635002B2Faceted EUV optical elementASML NETHERLANDS BV·Filed 2016·Granted Apr 28, 2020·5 cites·21 claims
- 4794US8847183B2System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirrorCymer LLC·Filed 2013·Granted Sep 30, 2014·6 cites·19 claims
- 4894US7361918B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Apr 22, 2008·35 cites·6 claims
- 4994US7217940B2Collector for EUV light sourceCYMER INC·Filed 2004·Granted May 15, 2007·60 cites·137 claims
- 5094US6744060B2Pulse power system for extreme ultraviolet and x-ray sourcesCYMER INC·Filed 2002·Granted Jun 1, 2004·79 cites·20 claims
Showing the top 50 of 170 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →