Inventor · disambiguated record
Tanuj Aggarwal
Also filed as: AGGARWAL TANUJ
14 granted patents·23 citations·filing 2015–2020
87Inventor score
Top patents by PatentIndex Score
14 records- 0193US9634455B1Gas optimization in a gas discharge light sourceCymer LLC·Filed 2016·Granted Apr 25, 2017·9 cites·24 claims
- 0287US9819136B2Gas mixture control in a gas discharge light sourceCymer LLC·Filed 2016·Granted Nov 14, 2017·5 cites·37 claims
- 0381US9762023B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2015·Granted Sep 12, 2017·3 cites·31 claims
- 0478US9939732B2Controller for an optical systemCymer LLC·Filed 2015·Granted Apr 10, 2018·2 cites·34 claims
- 0576US10627724B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·2 cites·20 claims
- 0676US10096969B1Method for dither free adaptive and robust dose control for photolithographyCymer LLC·Filed 2017·Granted Oct 9, 2018·2 cites·9 claims
- 0771US11769982B2Lithography system bandwidth controlCymer LLC·Filed 2020·Granted Sep 26, 2023·0 cites·15 claims
- 0868US11050213B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2020·Granted Jun 29, 2021·0 cites·20 claims
- 0963US10892594B2Gas optimization in a gas discharge light sourceCymer LLC·Filed 2018·Granted Jan 12, 2021·0 cites·25 claims
- 1058US10833471B2Lithography system bandwidth controlCymer LLC·Filed 2017·Granted Nov 10, 2020·0 cites·10 claims
- 1158US10218147B2Gas optimization in a gas discharge light sourceCymer LLC·Filed 2017·Granted Feb 26, 2019·0 cites·20 claims
- 1256US10727642B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2017·Granted Jul 28, 2020·0 cites·31 claims
- 1353US10090629B2Gas mixture control in a gas discharge light sourceCymer LLC·Filed 2017·Granted Oct 2, 2018·0 cites·25 claims
- 1440US10036963B2Estimating a gain relationship of an optical sourceCymer LLC·Filed 2016·Granted Jul 31, 2018·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →