Inventor · disambiguated record
Dmitriy Shneyder
Also filed as: SHNEYDER DMITRIY
12 granted patents·1 pending application·33 citations·filing 2005–2010
88Inventor score
Top patents by PatentIndex Score
13 records- 0184US7407554B2Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solventIBM·Filed 2005·Granted Aug 5, 2008·6 cites·12 claims
- 0282US7446859B2Apparatus and method for reducing contamination in immersion lithographyIBM·Filed 2006·Granted Nov 4, 2008·6 cites·10 claims
- 0380US7645694B2Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solventIBM·Filed 2008·Granted Jan 12, 2010·4 cites·13 claims
- 0472US8299584B2Alignment of wafers for 3D integrationSHNEYDER DMITRIY·Filed 2010·Granted Oct 30, 2012·5 cites·25 claims
- 0571US7869002B2Reducing contamination in immersion lithographyIBM·Filed 2008·Granted Jan 11, 2011·3 cites·7 claims
- 0667US7782445B2Reducing contamination in immersion lithographyIBM·Filed 2008·Granted Aug 24, 2010·2 cites·3 claims
- 0761US8467993B2Measurement tool monitoring using fleet measurement precision and tool matching precision analysisARCHIE CHARLES·Filed 2010·Granted Jun 18, 2013·2 cites·20 claims
- 0861US7807335B2Immersion lithography contamination gettering layerIBM·Filed 2005·Granted Oct 5, 2010·1 cites·22 claims
- 0961US7535349B2Determining root cause for alarm in processing systemIBM·Filed 2006·Granted May 19, 2009·3 cites·8 claims
- 1052US7569112B2Scanning probe apparatus with in-situ measurement probe tip cleaning capabilityIBM·Filed 2007·Granted Aug 4, 2009·1 cites·1 claims
- 1146US7787101B2Apparatus and method for reducing contamination in immersion lithographyIBM·Filed 2006·Granted Aug 31, 2010·0 cites·19 claims
- 1238US8347741B2Specimen handling apparatusIBM·Filed 2010·Granted Jan 8, 2013·0 cites·19 claims
- 1333US2011166683A1Real Time WIP OptimizerIBM·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →