Inventor · disambiguated record
Tanlin Dickey
Also filed as: DICKEY TANLIN · DICKEY TANLIN K
5 granted patents·2 pending applications·250 citations·filing 1999–2004
85Inventor score
Top patents by PatentIndex Score
7 records- 0195US7044838B2Chemical mechanical polishing head assembly having floating wafer carrier and retaining ringEBARA CORP·Filed 2004·Granted May 16, 2006·65 cites·16 claims
- 0290US6231428B1Chemical mechanical polishing head assembly having floating wafer carrier and retaining ringMITSUBISHI MATERIALS CORP·Filed 1999·Granted May 15, 2001·85 cites·60 claims
- 0382US6309290B1Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure controlMITSUBISHI MATERIALS CORP·Filed 1999·Granted Oct 30, 2001·46 cites·28 claims
- 0478US6543084B2Wafer scrubbing brush coreLAM RES CORP·Filed 2001·Granted Apr 8, 2003·20 cites·5 claims
- 0570US6240588B1Wafer scrubbing brush coreLAM RES CORP·Filed 1999·Granted Jun 5, 2001·34 cites·20 claims
- 0638US2002173242A1Chemical mechanical polishing head assembly having floating wafer carrier and retaining ringMITSUBISHI MATERIALS CORP·Filed 2001·Application pending·0 cites
- 0737US2001007810A1Chemical mechanical polishing head assembly having floating wafer carrier and retaining ringMITSUBISHI MATERIALS CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →